Disk-shaped substrate manufacturing method
AssigneesShowa Denko K.K., Citizen Seimitsu Co., Ltd.
InventorsKazuyuki Haneda, Satoshi Fujinami, Takeshi Jonouchi
Life of this patent
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Abstract
The disk-shaped substrate manufacturing method is provided with: generating an air stream downward from an upper area during grinding a disk-shaped substrate in a grinding apparatus; arranging the grinding apparatus on an upper floor face of a floor and arranging water on a lower floor face of the floor, the upper floor face being made of a board having penetration holes or a mesh member, and the lower floor face supporting the upper floor face so as to be located above the lower floor face with a distance; and guiding dust made by the grinding apparatus to the water by use of the air stream.
Claims8
A disk-shaped substrate manufacturing method, where a disk-shaped substrate is ground under a dust removal environment that is not a clean room as a previous step of a process performed in a clean room, comprising:
- grinding a disk-shaped substrate in a grinding apparatus that contains piping or wiring of the grinding apparatus on which dust accumulates on the piping or wiring and falls therefrom;
- generating an air stream downward from an upper area with respect to the grinding apparatus placed in the dust removal environment during grinding the disk-shaped substrate in the grinding apparatus;
- performing the grinding in a grinding apparatus that is arranged on an upper floor face of a floor while water is present on a lower floor face of the floor, the upper floor face being made of a board having penetration holes or a mesh member, and the lower floor face supporting the upper floor face so as to be located above the lower floor face with a distance;
- guiding dust made by the grinding apparatus to the water by use of the air stream;
- and
- reducing contact of dust accumulated on the piping or the wiring and falling therefrom to the disk-shaped substrate in processing by grinding the disk-shaped substrate in a grinding apparatus that contains the piping or wiring of the grinding apparatus below a processing area of the grinding apparatus.
A disk-shaped substrate manufacturing method, where a disk-shaped substrate is polished under a dust removal environment that is not a clean room as a previous step of a process performed in a clean room, comprising:
- polishing a disk-shaped substrate in a polishing apparatus that contains piping or wiring of the polishing apparatus on which dust accumulates on the piping or wiring and falls therefrom;
- generating an air stream downward from an upper area with respect to a polishing apparatus placed in the dust removal environment during polishing a disk-shaped substrate in the polishing apparatus during polishing a disk-shaped substrate in the polishing apparatus;
- performing the polishing in a polishing apparatus that is arranged on an upper floor face of a floor while water is present on a lower floor face of the floor, the upper floor face being made of a board having penetration holes or a mesh member, and the lower floor face supporting the upper floor face so as to be located above the lower floor face with a distance;
- guiding dust made by the polishing apparatus to the water by use of the air stream;
- and
- reducing contact of dust accumulated on the piping or the wiring and falling therefrom to the disk-shaped substrate in processing by polishing the disk-shaped substrate in a polishing apparatus that contains the piping or wiring of the polishing apparatus below a processing area of the polishing apparatus.
Dependencies are inferred from the claim text.