Socket, method for manufacturing socket, and semiconductor device
AssigneeFujikura Ltd.
InventorsYasuhiro Ouchi, Shinichi Nikaido, Haruo Miyazawa
Life of this patent
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Abstract
A socket includes an insulating elastomeric sheet having a penetration hole, metal circuits formed on at least one of the front and rear surfaces of the elastomeric sheet, and a through-hole having a metal film formed on an inner wall of the penetration hole. The metal circuit on the front surface of the elastomeric sheet is electrically connected to the metal circuit on the rear surface of the elastomeric sheet via the through-hole. With such a configuration of the socket, it is possible to provide a socket contact terminal and a semiconductor device having the same, which is suitable for low-resistance, large-current, and high-speed configurations.
Claims20
A socket comprising:
- an insulating elastomeric sheet formed from a fluorine-based elastomer having a penetration hole;
- metal circuits formed on the front and rear surfaces of the elastomeric sheet;
- a through-hole defined by a metal film formed on an inner wall of the penetration hole, wherein the metal circuit on the front surface of the elastomeric sheet is electrically connected to the metal circuit on the rear surface of the elastomeric sheet via the through-hole;
- and
- a groove is formed in the elastomeric sheet and surrounds at portion of the metal circuits,
- wherein the insulating elastomeric sheet comprises a convex portion formed of the fluorine-based elastomer, and wherein the metal circuit formed on one of the front and rear surfaces of the elastomeric sheet is formed to cover the convex portion of the elastomeric sheet, to engage the pad of a printed circuit board, and
- wherein a protective layer made of a material having a thermal expansion coefficient smaller than that of the elastomer sheet is laminated on at least one of the front and rear surfaces of the elastomeric sheet.
A method for manufacturing a socket, the method comprising:
- preparing an insulating elastomeric sheet formed from a fluorine-based elastomer having a penetration hole;
- and
- forming metal circuits on at least one of the front and rear surfaces of the elastomeric sheet and forming a through-hole by forming a metal film on an inner wall of the penetration hole, thereby obtaining a socket in which the metal circuit on the front surface of the elastomeric sheet is electrically connected to the metal circuit on the rear surface of the elastomeric sheet via the through-hole;
- and
- forming a groove on the elastomeric sheet surrounding at least a portion of the metal circuits,
- wherein the elastomeric sheet is formed to comprise a convex portion formed of the fluorine-based elastomer, and wherein the metal circuit on one of the front and rear surfaces of the elastomeric sheet is formed to cover the convex portion, and
- wherein a protective layer made of a material having a thermal coefficient smaller than that of the elastomeric sheet is laminated on at least one of the front and rear surfaces of the elastomeric sheet.
Dependencies are inferred from the claim text.