Back to results
US 8,136,920 B2Granted
Nozzle plate, method for manufacturing nozzle plate, droplet discharge head, and droplet discharge apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsNaoaki Sakurai, Junsei Yamabe, Hiroshi Koizumi
Life of this patent
Estimating the term…
Abstract
A nozzle plate includes: a first silicon layer; a glass layer; a second silicon layer provided between the first silicon layer and the glass layer, the second silicon layer being bonded to the glass layer; and a silicon oxide layer provided between the first silicon layer and the second silicon layer. A nozzle hole passing through the first silicon layer and discharging a droplet is formed. A channel passing through the silicon oxide layer and the second silicon layer and communicating with the nozzle hole is formed. A liquid chamber formed in the glass layer and communicating with the channel is formed.
Claims14
A nozzle plate comprising:
- a first silicon layer;
- a glass layer;
- a second silicon layer provided between the first silicon layer and the glass layer, the second silicon layer being bonded to the glass layer;
- and
- a silicon oxide layer provided between the first silicon layer and the second silicon layer,
- a nozzle hole passing through the first silicon layer and discharging a droplet being formed,
- a channel passing through the silicon oxide layer and the second silicon layer and communicating with the nozzle hole being formed,
- a liquid chamber formed in the glass layer and communicating with the channel being formed, and
- a liquid chamber layer provided in contact with the glass layer on a side thereof opposite to the second silicon layer and formed from a material different from that of the glass layer,
- wherein the liquid chamber extends in the liquid chamber layer.
7 more elements
A nozzle plate comprising:
- a first silicon layer;
- a glass layer;
- a second silicon layer provided between the first silicon layer and the glass layer, the second silicon layer being bonded to the glass layer;
- and
- a silicon oxide layer provided between the first silicon layer and the second silicon layer,
- a nozzle hole passing through the first silicon layer and discharging a droplet being formed
- a channel passing through the silicon oxide layer and the second silicon layer and communicating with the nozzle hole being formed,
- a liquid chamber formed in the glass layer and communicating with the channel being formed, and
- a liquid chamber layer bonded to the glass layer on a side thereof opposite to the second silicon layer and formed from a material different from that of the glass layer,
- the liquid chamber extending in the liquid chamber layer,
- wherein a cover layer is formed on a wall of the liquid chamber layer, the wall facing to the liquid chamber, and the cover layer is made of a material different from that of the liquid chamber layer.
8 more elements
A method for manufacturing a nozzle plate, comprising:
- in a laminated body including a first silicon layer, a second silicon layer, and a silicon oxide layer provided between the first silicon layer and the second silicon layer, forming a nozzle hole passing through the first silicon layer;
- forming a channel passing through the second silicon layer;
- removing the silicon oxide layer exposed to bottom of the channel so that the nozzle hole communicates with the channel;
- and
- anodic bonding the second silicon layer to a glass layer having a liquid chamber so that the channel communicates with the liquid chamber;
- and
- wherein a plurality of the nozzle holes are formed, and adjacent nozzle holes are partitioned with the glass layer.
4 more elements
A droplet discharge head comprising:
- a nozzle plate;
- and
- pressurizing means for applying pressure to liquid in the liquid chamber,
- the nozzle plate including:
- a first silicon layer;
- a glass layer;
- a second silicon layer provided between the first silicon layer and the glass layer, the second silicon layer being bonded to the glass layer;
- and
- a silicon oxide layer provided between the first silicon layer and the second silicon layer,
- a nozzle hole passing through the first silicon layer and discharging a droplet being formed,
- a channel passing through the silicon oxide layer and the second silicon layer and communicating with the nozzle hole being formed, and
- a liquid chamber formed in the glass layer and communicating with the channel being formed, and
- a plurality of the nozzle holes are provided, and adjacent nozzle holes are partitioned with the glass layer.
10 more elements
A droplet discharge apparatus comprising:
- a droplet discharge head;
- a driver for relatively moving an object and the droplet discharge head;
- and
- a controller for controlling the droplet discharge head and the driver,
- the droplet discharge head including:
- a nozzle plate;
- and
- pressurizing means for applying pressure to liquid in the liquid chamber,
- the nozzle plate including:
- a first silicon layer;
- a glass layer;
- a second silicon layer provided between the first silicon layer and the glass layer, the second silicon layer being bonded to the glass layer;
- and
- a silicon oxide layer provided between the first silicon layer and the second silicon layer,
- a nozzle hole passing through the first silicon layer and discharging a droplet being formed,
- a channel passing through the silicon oxide layer and the second silicon layer and communicating with the nozzle hole being formed,
- a liquid chamber formed in the glass layer and communicating with the channel being formed, and
- a plurality of the nozzle holes are provided, and adjacent nozzle holes are partitioned with the glass layer.
15 more elements
A nozzle plate comprising:
- a first silicon layer;
- a glass layer;
- a second silicon layer provided between the first silicon layer and the glass layer, the second silicon layer being bonded to the glass layer;
- and
- a silicon oxide layer provided between the first silicon layer and the second silicon layer,
- a nozzle hole passing through the first silicon layer and discharging a droplet being formed
- a channel passing through the silicon oxide layer and the second silicon layer and communicating with the nozzle hole being formed,
- a liquid chamber formed in the glass layer and communicating with the channel being formed, and
- wherein a plurality of the nozzle holes are provided, and adjacent nozzle holes are partitioned with the glass layer.
6 more elements
Dependencies are inferred from the claim text.