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US 8,136,911 B2Granted
Patterning apparatus, method for making organic electroluminescent element, organic electroluminescent element, and organic electroluminescent display
AssigneeKonica Minolta Holdings, Inc.
InventorsYousuke Takashima, Nobuhiko Takashima, Masaaki Murayama
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Abstract
A patterning apparatus for performing highly accurate patterning to substrates continuously transferred is provided. Furthermore, a method for manufacturing an organic electroluminescence element wherein such patterning apparatus is employed, an organic electroluminescence element and an organic electroluminescence display device obtained by using such manufacturing method are provided.
Claims11
A patterning apparatus, comprising:
- a nozzle ejection device to eject a function liquid onto a substrate fed as a continuing flexible sheet in a shape of a belt through the apparatus in a conveying direction;
- an image detection device upstream in the conveyance direction of the nozzle ejection device to detect an alignment mark formed on the substrate in advance of ejecting the function liquid through the nozzle ejection device onto the substrate;
- a speed detection device upstream in the conveyance direction of the nozzle ejection device to detect a conveyance speed of the substrate to be conveyed;
- and
- an ejection control device to combine feedback data from the image detection device and the speed detection device so as to create an ejection command signal;
- wherein the function liquid is ejected through the nozzle ejection device onto the substrate being conveyed in accordance with the ejection command signal of the ejection control device.
3 more elements
A patterning apparatus comprising:
- a conveyor device for conveying a substrate as a continuing flexible sheet in a shape of a belt through the apparatus in a conveyance direction at a conveyance speed;
- a nozzle ejection device to eject a function liquid onto the substrate as the substrate is conveyed through the apparatus;
- an image detection device upstream in the conveyance direction of the nozzle ejection device to detect an alignment mark formed on the substrate in advance of ejecting the function liquid through the nozzle ejection device onto the substrate, as the substrate is conveyed through the apparatus;
- a speed detection device upstream in the conveyance direction of the nozzle ejection device to detect the conveyance speed of the substrate conveyed through the apparatus;
- and
- an ejection control device to combine feedback data from the image detection device and the speed detection device so as to create an ejection command signal,
- wherein the function liquid is ejected through the nozzle ejection device onto the substrate as the substrate is conveyed through the apparatus in accordance with the ejection command signal of the ejection control device.
4 more elements
Dependencies are inferred from the claim text.