Attaching device and attaching apparatus for supporting plate, and attaching method for supporting plate

An attaching device for attaching a supporting plate to a surface of a substrate with an adhesive comprising:

• a mounting plate for mounting a substrate thereon;
• a pressing plate for pressing a supporting plate onto a substrate with adhesive between the substrate and the supporting plate;
• and a pair of alignment members, wherein the pair of alignment members are arranged to freely move back and forth in a horizontal direction, and blades for supporting a lower surface of the periphery of the supporting plate and pushing members for performing positioning in a state where the supporting plate is superposed on the substrate are provided at the tip ends of the alignment members, wherein each of said pushing members includes a pair of rollers, and a thickness of the rollers is larger than a combined thickness of the substrate and the adhesive, wherein the blades exclusively support the supporting plate before the supporting plate is adhesively bonded to the substrate;
• wherein the mounting plate and the pressing plate are located within a chamber which is connected to a vacuum source, and the alignment members are arranged to move back and forth by penetrating the side walls of the chamber.