Device for plasma treatment at atmospheric pressure
AssigneeFachhochschule Hildesheim/Holzminden/Goettingen
InventorsWolfgang Viol, Stefan Born, Andy Kaemling
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Abstract
A device (1) for plasma treatment comprises an electrode (2) having a surface (14) covered by a dielectric barrier (3), and an AC high voltage source (6) for applying an AC high voltage to the electrode (2) to bring about a dielectric barrier discharge (9) in a gas (10) at atmospheric pressure present in front of the dielectric barrier (3) in order to generate a plasma. To the end of generating the plasma even without a counter-electrode for the electrode (2), pointed tips are distributed over the surface (14) of the electrode (2), these pointed tips pointing towards the gas (10) in front of the dielectric barrier (3), whereas the dielectric barrier (3) has a smooth outer surface (15) facing the gas (10).
Claims16
A device for plasma treatment at atmospheric pressure, the device having:
- an electrode,
- a dielectric barrier directly arranged in front of the electrode and covering a surface of the electrode, and
- an AC high voltage source for applying an AC high voltage to the electrode to bring about a dielectric barrier discharge in a gas at atmospheric pressure present in front of an outer surface of the dielectric barrier, in order to generate a plasma,
- wherein the device has no counter-electrode for the electrode with the dielectric barrier,
- wherein the electrode, at the surface of the electrode covered by the dielectric barrier, comprises a two-dimensional distribution of pointed tips pointing towards the gas present in front of the dielectric barrier,
- wherein the outer surface of the dielectric barrier in front of which the gas is present is smooth, and
- wherein the electrode is made of an electrically conductive powder which is located in a ceramic solid body providing the dielectric barrier.
A device for plasma treatment at atmospheric pressure, the device having:
- an electrode,
- a dielectric barrier directly arranged in front of the electrode and covering a surface of the electrode, and
- an accumulator powered AC high voltage source for applying an AC high voltage to the electrode to bring about a dielectric barrier discharge in a gas at atmospheric pressure present in front of an outer surface of the dielectric barrier, in order to generate a plasma,
- wherein the AC high voltage source is designed so as to provide the AC high voltage as voltage pulse pairs of voltage pulses of alternating polarity at a repetition frequency of the voltage pulse pairs of less than 10,000 Hz and at a voltage amplitude of 5,000 volt to 60,000 volt,
- wherein the device has no counter-electrode for the electrode with the dielectric barrier,
- wherein the electrode, at the surface of the electrode covered by the dielectric barrier, comprises a two-dimensional distribution of pointed tips pointing towards the gas present in front of the dielectric barrier,
- wherein the outer surface of the dielectric barrier in front of which the gas is present is smooth, and
- wherein the electrode is made of an electrically conductive powder which is located in a ceramic solid body providing the dielectric barrier.
Dependencies are inferred from the claim text.