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AssigneeCommissariat a l'Energie Atomique
InventorsSébastien Hentz, Valérie Nguyen, Philippe Robert
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The invention relates to a micromachined accelerometer using a movable seismic mass suspended in relation to the substrate by elastic connections only allowing translation in its own plane along a sensitive axis (Oy). The mass acts on at least one elongate resonator by means of a force amplification structure associated with this resonator. The amplification structure comprises a rigid lever arm, a first end of which is connected to the seismic mass by a connection having, in the plane of the mass, a high stiffness in the direction of the sensitive axis (Oy) and a low stiffness in the perpendicular direction, and a second end is connected to an anchor point on the substrate. The second end of the lever arm is a rigid head piece surrounding the anchor point and connected to this anchor point by a rotational connection about a center of rotation. The resonator has one end fixed to the rigid head piece at a point such that the longitudinal axis of the resonator passes a distance h, small in relation to the length L of the lever arm but nonzero, from the center of rotation of the rotational connection.
A micromachined accelerometer using a movable seismic mass suspended in relation to a substrate by elastic connections principally allowing translation in its own plane along a sensitive axis (Oy), the mass acting on at least one elongate resonator by means of a force amplification structure associated with this resonator, the amplification structure comprising a rigid lever arm, a first end of which is connected to the seismic mass by a connection having, in the plane of the mass, a high stiffness in the direction of the sensitive axis (Oy) and a low stiffness in the perpendicular direction, and a second end of which is connected to an anchor point on the substrate, wherein the second end of the lever arm is a rigid piece connected to the anchor point by a purely rotational connection about a center of rotation, the resonator having one end fixed to the rigid piece at a point such that the longitudinal axis of the resonator passes a distance h, small in relation to the length L of the lever arm but nonzero, from the center of rotation of the rotational connection.
Dependencies are inferred from the claim text.