US 8,136,224 B1 · Method and system for providing a perpendicular magnetic recording head utilizing a mask having an undercut line

Abstract

A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The line has at least one side, a top, and a bottom. The side(s) have an undercut such that the top of the line is wider than the bottom. The method further include providing a hard mask on the PMR transducer. The hard mask includes an aperture corresponding to the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

Claims16

Dependent claims

A method for providing a PMR pole in a magnetic recording transducer including an intermediate layer, the method comprising:

providing a mask on the intermediate layer, the mask including a line having at least one side, a top, and a bottom, the at least one side having an undercut such that the top is wider than the bottom;
providing a hard mask on the PMR transducer, the hard mask including an aperture corresponding to the line;
forming a trench in the intermediate layer under the aperture, the trench having a bottom and a top wider than the bottom;
and
providing a PMR pole, at least a portion of the PMR pole residing in the trench.

2 more elements

Dependencies are inferred from the claim text.

Method and system for providing a perpendicular magnetic recording head utilizing a mask having an undercut line

Life of this patent

Method and system for providing a perpendicular magnetic recording head utilizing a mask having an undercut line

Life of this patent

Abstract

Claims16