Systems for real-time contamination, environmental, or physical monitoring of a photomask

A system comprising:

• a photomask including a mask field with a pattern of features configured to correspond to features of an integrated circuit;
• a pellicle coupled with the photomask, the pellicle including a transparent membrane and a frame connecting the transparent membrane with the photomask to define an enclosed space isolated from an ambient environment;
• an electronics package physically mounted to the photomask and located inside the enclosed space, the electronics package including a sensor configured to monitor an attribute and generate sensor data related to the attribute, a first transceiver, and a processor coupled with the sensor and coupled with the transceiver;
• and
• a processing device in communication with the electronics package, the processing device configured to analyze the sensor data communicated from the electronics package to the processing device,
• wherein the frame is coupled with the first transceiver so as to operate as a first antenna for transmitting the sensor data from the electronics package to the processing device.