Optical modulation device utilizing electro-optic effect
AssigneeFujitsu Limited
InventorsTakashi Shiraishi, Tetsuya Miyatake, Tetsu Hasegawa
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Abstract
An optical modulation device includes: a crystal substrate having an electro-optic effect; an optical waveguide formed in the crystal substrate; an electrode formed on the crystal substrate, to apply an electric field to the optical waveguide; and a buried layer of low dielectric constant buried to avoid the optical waveguide, in at least one portion of a lower region of the electrode inside the crystal substrate, which is spaced from both of a front surface of the crystal substrate on which the electrode is formed and a rear surface thereof opposed to the front surface.
Claims8
An optical modulation device comprising:
- a crystal substrate having an electro-optic effect;
- an optical waveguide formed in the crystal substrate;
- an electrode formed iron a front surface of the crystal substrate, which electrode applies an electric field to the optical waveguide;
- and
- a buried layer of low dielectric constant buried in an internal portion of the crystal substrate except a portion containing the optical waveguide, wherein the buried layer is at least partially formed in a region of the internal portion of the crystal substrate under the electrode, and is spaced from both of the front surface of the crystal substrate and a rear surface thereof opposed to the front surface.
Dependencies are inferred from the claim text.