Static eliminator and discharge electrode unit built therein

Abstract

There is provided a static eliminator capable of weakening an electric field between a discharge electrode and a ground electrode, to generate a strong electric field between the discharge electrode and a workpiece, in which a first-stage circumferential chamber, a second-stage circumferential chamber and a first gas pool are arrayed in series along the longitudinal direction of a discharge electrode, the first gas pool is disposed in the mode of diametrically overlapping a gas outflow channel for shielding located on the inner circumferential side of the first gas pool, a gas is supplied to the first gas pool through the chambers disposed at multi-stages by means of the circumferentially spaced multi-stage orifices (the first and second chases), a ground electrode plate member in plate shape is buried in an insulating resin member on the bottom surface side of the half base in a position as high as where the first gas pool is located, and the ground electrode plate member includes a circular ring section concentric with the discharge electrode.

Dependencies are inferred from the claim text.