Micro electro mechanical system and head gimbal assembly

A head gimbal assembly comprising:

• a suspension;
• and a head slider held by the suspension, wherein the suspension comprises:
• a gimbal;
• a micro electro mechanical system secured to the gimbal, to which a head slider is attached detachably, comprising a connection terminal for contacting a connection pad of the head slider, a clamper for pressing the head slider toward the connection terminal, and two clamp springs that each connect to the clamper to generate a clamping force, wherein the two clamp springs are disposed on opposing sides of the head slider, and wherein the two clamp springs are aligned perpendicular to the clamping force;
• and
• a limiter for contacting the clamper to limit movement of the damper in both directions vertical to the clamping force in plane.

A head gimbal assembly comprising:

• a suspension;
• and
• a head slider held by the suspension, wherein the suspension comprises:
• a plurality of connection terminals configured to contact a plurality of connection pads of the head slider,
• a clamper configured to press the head slider toward the connection terminals, and
• two clamp springs that are each connect to the clamper to generate a clamping force, wherein the two clamp springs are disposed on opposing sides of the head slider, and wherein the two clamp springs are aligned perpendicular to the clamping force,
• wherein a part of the plurality of connection terminals function as stoppers for holding the head slider between the part of the plurality of connection terminals and the clamper;
• and the other connection terminals of the plurality of connection terminals have smaller spring constants in the clamping force direction than the connection terminals functioning as stoppers.