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US 8,134,772 B2Granted
Mirror device with an anti-stiction layer
AssigneesSilicon Quest Kabushiki-Kaisha, Olympus Corporation
InventorsYoshihiro Maeda, Fusao Ishii, Kazuhiro Watanabe, Hirotoshi Ichikawa
Life of this patent
Estimating the term…
Abstract
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
Claims11
A micromirror device comprising:
- a mirror supported on a deformable elastic hinge for deflecting to different deflection angles to operate in at least an ON state for reflecting an incident light toward a projected light path and an OFF state for reflecting the incident light away from the projected light path,
- an address electrode disposed on the substrate below the mirror for receiving a signal from a drive circuit for applying a voltage to deflect the mirror to different deflection angles;
- an oriented monolayer composed of a fluorinated carbon number of 6 or less covering the address electrode disposed below the mirror adjacent to the deformable elastic hinge functioning as a stopper for contacting and stopping the mirror when the mirror is deflected to a maximum or a minimum deflection angle.
TA projection device:
- comprising:
- a light source includes a semiconductor laser light source for projecting an incident light;
- a mirror supported on a deformable elastic for deflecting to different deflection angles to operate in at least an ON state for reflecting the incident light toward a projected light path and an OFF state for reflecting the incident light away from the projected light path,
- an address electrode disposed on the substrate below the mirror for receiving a signal from a drive circuit for applying a voltage to deflect the mirror to different deflection angles;
- an oriented monolayer composed of a fluorinated carbon number of 6 or less covering the address electrode;
- and
- the mirror is deflected to substantially symmetrical deflection angles on two opposite sides of a deflection axis when operated in the ON state and the OFF state.
4 more elements
A micromirror device:
- comprising:
- a mirror supported on a deformable elastic for deflecting to different deflection angles to operate in at least an ON state for reflecting the incident light toward a projected light path and an OFF state for reflecting the incident light away from the projected light path,
- an address electrode disposed on the substrate below the mirror for receiving a signal from a drive circuit for applying a voltage to deflect the mirror to different deflection angles;
- an oriented monolayer composed of a fluorinated carbon number of 6 or less covering the address electrode;
- and
- the mirror is deflected to the ON state with a first relative deflection angle relative to a horizontal plane and the mirror is deflected to the OFF state with a second deflection angle relative the horizontal plane wherein the first relative deflection angle has a different absolute value than the second reflection deflection angle.
3 more elements
A micromirror device:
- comprising:
- a mirror supported on a deformable elastic for deflecting to different deflection angles to operate in at least an ON state for reflecting the incident light toward a projected light path and an OFF state for reflecting the incident light away from the projected light path,
- an address electrode disposed on the substrate below the mirror for receiving a signal from a drive circuit for applying a voltage to deflect the mirror to different deflection angles;
- an oriented monolayer composed of a fluorinated carbon number of 6 or less covering the address electrode;
- and
- the address electrode further comprises a right address electrode and a left address electrode disposed on a right side and a left side of the deformable elastic hinge for contacting and stopping the mirror when the mirror is deflected to the ON state and the OFF state respectively wherein a top surface area of the right address electrode is different from a top surface area of the if address electrode.
3 more elements
A micromirror device:
- comprising:
- a mirror supported on a deformable elastic for deflecting to different deflection angles to operate in at least an ON state for reflecting the incident light toward a projected light path and an OFF state for reflecting the incident light away from the projected light path,
- an address electrode disposed on the substrate below the mirror for receiving a signal from a drive circuit for applying a voltage to deflect the mirror to different deflection angles;
- an oriented monolayer composed of a fluorinated carbon number of 6 or less covering the address electrode;
- and
- the driver circuit further controls the mirror to operate in an oscillation state with the mirror oscillates between the ON state and the OFF state.
3 more elements
Dependencies are inferred from the claim text.