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US 8,134,767 B2Granted
Mirror device
AssigneesSilicon Quest Kabushiki-Kaisha, Olympus Corporation
InventorsYoshihiro Maeda, Hirotoshi Ichikawa, Fusao Ishii
Life of this patent
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Abstract
A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
Claims2
A MEMS device, comprising:
- a fixed electrode covered with a protective film disposed on a substrate;
- a movable electrode disposed above the fixed electrode;
- and
- a hinge composed of a semiconductor material selected from a group of materials consisted of a single crystal silicon, a polysilicon, and an amorphous silicon and joined to the movable electrode and the fixed electrode, wherein the hinge has a resistance is higher than the movable electrode and the fixed electrode.
1 more element
Dependencies are inferred from the claim text.