US 8,134,760 B2 · Achieving convergent light rays emitted by planar array of light sources

Abstract

Systems and methods are provided for achieving convergent light rays emitted by a planar array of light sources. In one embodiment, an imaging device is provided for inspecting semiconductors or other objects. The imaging device includes one or more imaging lens for imaging light reflected from an object. The imaging device also includes a first light source attached to a planar circuit board and a second light source attached to the planar circuit board. The imaging device further includes a first Fresnel prism for directing light from the first light source toward the object from a first direction and a second Fresnel prism for directing light from the second light source toward the object from a second direction. In one embodiment, the imaging device also includes one or more optical elements for increasing or decreasing the divergence of the light.

Claims12

Dependent claims

An imaging device for inspecting semiconductors, the imaging device comprising:

an imaging lens for imaging light reflected from an object;
a first planar element comprising at least a first light source and a second light source;
and
a second planar element comprising at least a first Fresnel prism and a second Fresnel prism,
wherein the first planar element is positioned substantially parallel to the second planar element such that the first Fresnel prism redirects light from the first light source toward the object from a first direction and the second Fresnel prism redirects light from the second light source toward the object from a second direction,
wherein the redirected light from the first light source diverges from the first Fresnel prism so as to illuminate a desired portion of the object from the first direction, and
wherein the redirected light from the second light source diverges from the second Fresnel prism so as to illuminate the desired portion of the object from the second direction.

4 more elements

Dependencies are inferred from the claim text.

Achieving convergent light rays emitted by planar array of light sources

Life of this patent

Achieving convergent light rays emitted by planar array of light sources

Life of this patent

Abstract

Claims12