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US 8,134,699 B2Granted
Illumination system for optical inspection
AssigneesApplied Materials, Inc., Applied Materials Israel Ltd.
InventorsRon Naftali, Avishay Guetta, Haim Feldman, Doron Shoham
Life of this patent
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Abstract
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
Claims6
An apparatus for optical inspection of a sample, comprising:
- a detector assembly configured to capture an image of an area of a surface on the sample;
- a laser source adapted to generate first and second beams of radiation having different, respective first and second wavelengths;
- and
- an illumination module configured to direct the first and second beams of the radiation to irradiate the area on the sample, the illumination module comprising an optical switch operative to switch both of the first and second beams simultaneously and independently between normal optics and oblique optics.
1 more element
A method for optical inspection of a sample, comprising:
- generating first and second beams of laser radiation having different, respective first and second wavelengths;
- directing the first and second beams of the radiation to irradiate an area of a surface on the sample via an optical switch operative to switch both of the first and second beams simultaneously and independently between normal optics and oblique optics;
- and
- capturing radiation that is scattered from the area in order to form an image of the area.
1 more element
Dependencies are inferred from the claim text.