Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

A movable body drive system in which a movable body is driven along a predetermined plane, the system comprising:

• an encoder system which includes a plurality of first heads that irradiates a first measurement beam on a measurement surface, parallel to the plane, on which a grating is arranged, and receives the beam from the grating;
• and
• a controller which measures a first direction positional information of the movable body in a first direction in the plane using the first head of the encoder system, and drives the movable body along the plane, based on a measurement result of the first direction positional information and positional information, of the first measurement beam emitted from the first head used for measurement of the first direction positional information, in a surface parallel to the plane, wherein
• the positional information of the first measurement beam includes positional information of an irradiation point of the first measurement beam in a direction orthogonal to a measurement direction of the first head.