Immersion lithography using hafnium-based nanoparticles
AssigneesSematech, Inc., Intel Corporation
InventorsPaul A. Zimmerman, Jeffrey Byers
Life of this patent
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Abstract
Method, apparatus, and composition of matter suited for use with, for example, immersion lithography. The composition of matter includes hafnium dioxide nanoparticles having diameters less than or equal to about 15 nanometers. The apparatus includes the composition of matter, a light source, a platform for supporting a work piece, and a lens element. The method includes providing a light source, providing a lens element between the light source and a work piece, providing the composition of matter between the lens element and the work piece, and exposing the work piece to light provided by the light source by passing light from the light source through the lens element and the composition of matter to the work piece.
Claims15
A composition of matter comprising:
- a medium;
- and
- Hafnium dioxide nanoparticles incorporated in the medium, the Hafnium dioxide nanoparticles having a diameter less than or equal to about 15 nanometers;
- wherein said composition of matter is an immersion fluid or a resist.
An apparatus comprising:
- a light source;
- a platform for supporting a work piece;
- a lens element positioned between the light source and the platform;
- and
- a composition of matter positioned between the lens element and the platform, the composition of matter comprising:
- a first medium;
- and
- first Hafnium dioxide nanoparticles incorporated in the first medium, the first Hafnium dioxide nanoparticles having a diameter less than or equal to about 15 nanometers;
- wherein said composition of matter is an immersion fluid or a resist.
A method for immersion lithography comprising:
- providing a light source;
- providing a lens element between the light source and a work piece;
- providing a composition of matter between the lens element and the work piece, the composition of matter comprising:
- a first medium;
- and
- first Hafnium dioxide nanoparticles incorporated in the first medium, the first Hafnium dioxide nanoparticles having a diameter less than or equal to about 15 nanometers;
- and
- exposing the work piece to light provided by the light source by passing light from the light source through the lens element and the composition of matter to the work piece;
- wherein said composition of matter is an immersion fluid or a resist.
Dependencies are inferred from the claim text.