Connection board, probe card, and electronic device test apparatus comprising same
AssigneeAdvantest Corporation
InventorsYoshihiro Abe, Takaji Ishikawa, Noriaki Shimasaki, Shigeru Matsumura
Life of this patent
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Abstract
A probe card is provided which includes: probe needles electrically contacting input/output terminals of an IC device formed on a semiconductor wafer W; a mount base on which the probe needles are mounted; a support column supporting the mount base, a circuit board having interconnect patterns electrically connected to the probe needles via bonding wires; and a base member and stiffener for reinforcing the probe card. The mount base and the circuit board are noncontact.
Claims11
A connection board for electrically connecting a device under test and an electronic device test apparatus when testing the device under test, the connection board comprising:
- contactors for electrical connection with input/output terminals of the device under test;
- a first board on which the contactors are mounted;
- a second board having interconnect patterns electrically connected with the contactors;
- a support member supporting the first board;
- a first reinforcing member to which the support member is fixed;
- and
- a second reinforcing member which is fixed to the first reinforcing member and which is fixed to the second board at an outer peripheral part of the second reinforcing member, wherein
- the first board and the second board are not in contact with each other,
- a first through hole is formed in the first board and runs from a front surface of the first board to a back surface of the first board,
- the contactors and the interconnect patterns of the second board are electrically connected via bonding wires passing through the first through hole,
- the bonding wires are provided with slack,
- the first reinforcing member is interposed between the second board and the second reinforcing member, and
- the first reinforcing member is fixed to the second board via the second reinforcing member.
Dependencies are inferred from the claim text.