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US 8,134,376 B2Granted
Method of measuring electronic device and measuring apparatus
AssigneeTohoku University
InventorsTadahiro Ohmi, Akinobu Teramoto
Life of this patent
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Abstract
In a method for measuring an electronic device which is an object to be measured, a passive element is connected to the electronic device in parallel, and electric parameters of the electronic device are extracted by measuring an impedance of the entire circuit.
Claims5
A method of measuring an electronic device as a measurement object, comprising:
- connecting a passive clement in parallel with the electronic device, and
- measuring an impedance of an entire circuit using an impedance measuring device connected between both terminals of the electronic device to thereby extract an electrical parameter of the electronic device,
- wherein the entire circuit is structured by the electronic device and the passive element,
- wherein a current which flows between the terminals of the electronic device is 7 μA or more and the electronic device is a semiconductor device,
- wherein the passive element comprises an inductance and a resistance connected in series with the inductance, and
- wherein the measurement is performed by causing a resonance phenomenon.
3 more elements
A measuring apparatus for measuring an electronic device as a measurement object, comprising:
- a passive element connected in parallel with the electronic device, and
- an impedance measuring device connected between both terminals of the electronic device
- wherein:
- an entire circuit is structured by the electronic device and the passive element, and
- an electrical parameter of the electronic device is extracted by measuring an impedance of the entire circuit using the impedance measuring device,
- wherein a current which flows between the terminals of the electronic device is 7 μA or more and the electronic device is a semiconductor device,
- wherein the passive element comprises an inductance and a resistance connected in series with the inductance, and
- the measurement is performed by causing a resonance phenomenon.
5 more elements
A measuring apparatus for measuring an electronic device as a measurement object, comprising:
- a known passive element is connected in parallel with the electronic device, and
- an impedance measuring device connected between both terminals of the electronic device,
- wherein:
- an entire circuit is structured by the electronic device and the passive element, and
- an electrical parameter of the electronic device is extracted by measuring an impedance of the entire circuit using the impedance measuring device,
- wherein a current which flows between the terminals is 7 μA or more and the electronic device is a semiconductor device,
- wherein the passive clement comprises an inductance and a resistance connected in series with the inductance, and
- the measurement is performed by causing a resonance phenomenon.
5 more elements
Dependencies are inferred from the claim text.