Low voltage closed drift anode layer ion source
AssigneeMirrage, Ltd.
InventorRay Price
Life of this patent
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Abstract
An ion source includes a pair of pole elements, at least one shunt element, and at least one magnetic field producing element that produces a magnetic field. A gap is defined between the pole elements of the pair of pole elements. The at least one magnetic field producing element and the at least one shunt element cooperate to define at least a part of a magnetic field conducting circuit that conducts the magnetic field between the pole elements of the pair of pole elements. The pair of pole elements and the at least one shunt element are formed from a material that consists essentially of ferrous metal having an overall carbon content of less than 0.08 percent.
Claims10
An ion source, comprising:
- a pair of pole elements, wherein a gap is defined between the pole elements of the pair of pole elements;
- at least one shunt element;
- at least one magnetic field producing element that produces a magnetic field, the at least one magnetic field producing element and the at least one shunt element cooperating to define at least a part of a magnetic field conducting circuit that conducts the magnetic field between the pole elements of the pair of pole elements;
- and
- the pair of pole elements and the at least one shunt element consisting essentially of ferrous metal having an overall carbon content of essentially 0.08 percent or less.
Dependencies are inferred from the claim text.