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US 8,134,278 B2Granted
Surface acoustic wave device and surface acoustic wave biosensor
AssigneeSamsung Electronics Co., Ltd.
InventorsEun Chol Cho, Hun Joo Lee, Soo Suk Lee
Life of this patent
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Abstract
A surface acoustic wave device, including: a piezoelectric substrate; an interdigitated transducer electrode disposed on the substrate; an oxide film disposed on surface of the interdigitated transducer electrode; and a hydrophobic film disposed on a surface of the oxide film.
Claims14
A surface acoustic wave device, comprising:
- a piezoelectric substrate;
- an interdigitated transducer electrode disposed on the substrate;
- an oxide film disposed on a surface of the interdigitated transducer electrode;
- and
- a hydrophobic thin film disposed on a surface of the oxide film, wherein the hydrophobic thin film comprises a functional group which is bonded to the oxide film, wherein the functional group is selected from the group consisting of a carboxyl group, a sulfonic acid group, a phosphonic acid group, and a combination thereof.
2 more elements
A surface acoustic wave biosensor, comprising:
- a piezoelectric substrate;
- a pair of interdigitated transducer electrodes disposed on the substrate;
- a reactive film disposed on the piezoelectric substrate, the reactive film covering the interdigitated transducer electrodes and combining with a receptor, which can bind to a target material;
- an oxide film disposed on a surface of the interdigitated transducer electrodes;
- and
- a hydrophobic film disposed on a surface of the oxide film, wherein the hydrophobic thin film comprises a functional group which is bonded to the oxide film, wherein the functional group is selected from the group consisting of a carboxyl group, a sulfonic acid group, a phosphonic acid group, and a combination thereof.
3 more elements
Dependencies are inferred from the claim text.