Loading patent…
AssigneeASML Netherlands B.V.
InventorsVadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken, Johannes Bernardus Ridder, Harm-Jan Voorma, Carolus Ida Maria Antonius Spee, Klaas Timmer
Estimating the term…
A collector assembly with a radiation collector, a cover plate and a support member connecting the radiation collector to the cover plate are provided. The cover plate is designed to cover an opening in a collector chamber. The collector chamber opening may be large enough to pass the radiation collector and the support member. The removed radiation collector can be cleaned with different cleaning procedures, which may be performed in a cleaning device. Such cleaning device may for example consist of the following: a circumferential hull designed to provide an enclosure volume for circumferentially enclosing at least the radiation collector; an inlet configured to provide at least one of a cleaning gas and a cleaning liquid to the enclosure volume to clean at least said radiation collector; and an outlet configured to remove said at least one of said cleaning gas and said cleaning liquid from the enclosure volume.
A system comprising a collector chamber and a collector assembly, the collector chamber comprising a collector chamber opening, the collector assembly comprising a radiation collector, a cover plate and a support member connecting said radiation collector to said cover plate, said cover plate being constructed and arranged to cover said collector chamber opening, said collector chamber opening being large enough to pass said radiation collector and the support member therethrough.
Dependencies are inferred from the claim text.