Method and apparatus for observing inside structures, and specimen holder
AssigneeHitachi, Ltd.
InventorsShohei Terada, Kazutoshi Kaji, Shigeto Isakozawa
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Abstract
An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.
Claims3
A specimen holder which is adapted for lateral entry into an electron microscope, said specimen holder comprising:
- a specimen holder main body;
- a probe base disposed on said main body, disposed inside said specimen holder and provided with multiple probes;
- a specimen holding base positioned to face said probe base, said specimen holding base holding a specimen;
- and
- an interconnect connected to electrodes disposed on said probe base for applying a voltage to said electrodes;
- and
- wherein said specimen holding base has a specimen mesh which holds said specimen and has a fine adjustment mechanisim capable of moving in three-axis directions perpendicular to one another using a piezoelectric device.
Dependencies are inferred from the claim text.