Method of forming silicon nanocrystal embedded silicon oxide electroluminescence device with a mid-bandgap transition layer

A method for forming a silicon (Si) nanocrystal embedded Si oxide electroluminescence (EL) device with a mid-bandgap transition layer, the method comprising:

• providing a highly doped Si bottom electrode;
• forming a mid-bandgap electrically insulating dielectric film overlying the Si bottom electrode;
• depositing a Si nanocrystal embedded SiOx film overlying the mid-bandgap electrically insulating dielectric film, where X is less than 2, using a high density plasma-enhanced chemical vapor deposition (HDPECVD) process as follows;
• introducing silane (SiH4) in a range of about 20 to 40 standard cubic centimeters (SCCM);
• introducing N2O in a range of about 15 to 35 SCCM;
• supplying power to a top electrode at a frequency in a range of 13.56 to 300 megahertz (MHz), and a power density in a range of about 1 to 20 watts per square centimeter (W/cm2);
• and,
• supplying power to a bottom electrode at a frequency in a range of 50 kilohertz to 13.56 MHz, and a power density in a range of about 1 to 5 W/cm2;
• subsequent to depositing a SiOx film layer, annealing;
• in response to the annealing, embedding Si nanocrystals in the SiOx film layer;
• forming a transparent top electrode overlying the Si nanocrystal embedded SiOx film;
• and,
• where the bandgap of the mid-bandgap electrically insulating dielectric film is about half that of the bandgap of the Si nanocrystal embedded SiOx film.