EL display device and method of manufacturing the same
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Kunitaka Yamamoto, Masaaki Hiroki, Takeshi Fukunaga
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Abstract
To provide a high throughput film deposition means for film depositing an organic EL material made of polymer accurately and without any positional shift. A pixel portion is divided into a plurality of pixel rows by a bank, and a head portion of a thin film deposition apparatus is scanned along a pixel row to thereby simultaneously apply a red light emitting layer application liquid, a green light emitting layer application liquid, and a blue light emitting layer application liquid in stripe shapes. Heat treatment is then performed to thereby form light emitting layers luminescing each of the colors red, green, and blue.
Claims18
A method of manufacturing a light emitting device comprising:
- forming a plurality of stripe shape banks over a substrate to form a plurality of grooves including a first groove and a second groove wherein a plurality of electrodes are arranged along each of the plurality of grooves;
- continuously discharging a first liquid from a first nozzle into the first groove and a second liquid from a second nozzle into the second groove while relatively moving the first nozzle and the second nozzle along the first groove and the second groove, the first liquid including a first organic light emitting material and the second liquid including a second organic light emitting material, thereby, forming a first layer containing the first liquid continuously over the plurality of electrodes in the first groove, and a second layer containing the second liquid continuously over the plurality of electrodes in the second groove.
A method of manufacturing a light emitting device comprising:
- forming a plurality of stripe shape banks over a substrate to form a plurality of grooves including a first groove and a second groove wherein at least two electrodes are arranged along the first groove and at least two electrodes are arranged along the second groove;
- continuously discharging a first liquid from a first nozzle into the first groove while relatively moving the first nozzle along the first groove, the first liquid including a first organic light emitting material, thereby, forming a first layer containing the first liquid continuously over at least the two electrodes in the first groove;
- and
- continuously discharging a second liquid from a second nozzle into the second groove while relatively moving the second nozzle along the second groove, the second liquid including a second organic light emitting material, thereby, forming a second layer containing the second liquid continuously over at least the two electrodes in the second groove.
Dependencies are inferred from the claim text.