Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces

A method of forming features on a workpiece by depositing material onto the workpiece in a reaction chamber, the method comprising:

• depositing a monolayer of first molecules of a first gas onto the workpiece in the reaction chamber;
• selectively altering a first portion of the first molecules on the workpiece in a pattern using a laser beam, wherein selectively altering the first portion of the first molecules comprises desorbing the first portion of the first molecules from the workpiece;
• depositing second molecules of a second gas onto the second portion of the first molecules on the workpiece to form material with the first molecules, wherein the first and second gases have different compositions and
• repeating the depositing and the selectively altering to form a feature on the workpiece.

A method of forming features on a workpiece by depositing material onto the workpiece in a reaction chamber, the method comprising:

• depositing a monolayer or approximately a monolayer of first molecules of a first gas onto the workpiece in the reaction chamber;
• directing a laser beam toward a first portion of the first molecules on the workpiece in the reaction chamber to desorb the first portion of the first molecules without desorbing a second portion of the first molecules;
• depositing second molecules of a second gas onto the second portion of the first molecules, wherein the first and second gases have different compositions;
• and
• repeating the depositing and the directing to form a feature on the workpiece.