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US 8,133,529 B2Granted
Method of forming a micromagnetic device
AssigneeEnpirion, Inc.
InventorsAshraf W. Lotfi, Trifon M. Liakopoulos, Robert W. Filas
Life of this patent
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Abstract
A method of forming a micromagnetic device including providing a substrate and forming a magnetic core layer over the substrate from a magnetic alloy. The magnetic alloy includes iron, cobalt and phosphorous. A content of the cobalt is in a range of 1.8 to 4.5 atomic percent. A content of the phosphorus is in a range of 20.1 to 30 atomic percent. A content of the iron is substantially a remaining proportion of the magnetic alloy.
Claims20
A method of forming a micromagnetic device, comprising:
- providing a substrate;
- and
- forming a magnetic core layer over said substrate from a magnetic alloy including iron, cobalt, phosphorous and at least one of sulfur, vanadium, tungsten and copper, wherein a content of said at least one of sulfur, vanadium, tungsten and copper is in a range of 1 to 100 parts per million, a content of said cobalt is in a range of 1.8 to 4.5 atomic percent, a content of said phosphorus is in a range of 20.1 to 30 atomic percent, and a content of said iron is substantially a remaining proportion of said magnetic alloy.
A method of forming a micromagnetic device, comprising:
- providing a substrate;
- forming a magnetic core layer over said substrate from a magnetic alloy;
- forming an insulating layer over said magnetic core layer;
- and
- forming another magnetic core layer over said insulating layer from a magnetic alloy, wherein at least one of said magnetic alloys include iron, cobalt, phosphorous and at least one of sulfur, vanadium, tungsten and copper, wherein a content of said at least one of sulfur, vanadium, tungsten and copper is in a range of 1 to 100 parts per million, a content of said cobalt is in a range of 1.8 to 4.5 atomic percent, a content of said phosphorus is in a range of 20.1 to 30 atomic percent, and a content of said iron is substantially a remaining proportion of said at least one of said magnetic alloys.
2 more elements
Dependencies are inferred from the claim text.