Pattern transfer method and imprint device

A pattern transfer method, comprising:

• adjusting a relative position between a transferred object and a stamper having a concavo-convex pattern in a surface thereof;
• contacting and pressurizing a concavo-convex pattern plane of the stamper to the transferred object and thus transferring the concavo-convex pattern of the stamper to the transferred object;
• and detaching the stamper from the transferred object,
• wherein the step of adjusting a relative position between the transferred object and the stamper includes:
• taking at least one first two-dimensional image of two edge positions of the transferred object on at least one axis, compressing the at least one first two-dimensional image to at least one first one-dimensional image and calculating a center position of the transferred object on the at least one axis by performing a symmetry operation on the at least one first one-dimensional image;
• taking at least one second two-dimensional image of an edge of the stamper or two alignment marks formed in the stamper on the at least one axis where the at least one first two-dimensional image of the transferred object is taken, compressing the at least one second two-dimensional image to at least one second one-dimensional image and calculating a center position of the stamper on the at least one axis by performing a symmetry operation on the at least one second one-dimensional image;
• and
• adjusting a relative position between the transferred object and the stamper from a relation between the calculated center position of the transferred object and the calculated center position of the stamper.