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US 8,133,348 B2Granted
Plasma generating apparatus and plasma treatment apparatus
AssigneesShibaura Mechatronics Corporation, Kabushiki Kaisha Toshiba
InventorsIvan Petrov Ganachev, Yoshikazu Tsugami, Kohei Shimatani, Masashi Yamage
Life of this patent
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Abstract
A plasma generating apparatus includes a coaxial convertor for coaxial-converting a microwave, a generally annular ring slot that passes the coaxial-converted microwave, and a dielectric window that propagates the microwave passed through the ring slot. A plasma is produced by the microwave propagated through the dielectric window. This enables stable formation of a plasma having a uniform distribution over a large area.
Claims10
A plasma generating apparatus, comprising:
- coaxial conversion means for coaxial-converting a microwave, the coaxial conversion means including:
- a coaxial introduction section having a generally cylindrical waveguide provided generally coaxially with a central axis of a generally annular ring slot and a core provided near the central axis, the coaxial introduction section propagating the microwave generally parallel to the central axis;
- and
- a coaxial conversion section where the microwave propagated through the coaxial introduction section is spread generally perpendicular to the central axis in a cylindrical space provided generally coaxially with the central axis and is guided to the generally annular ring slot through an annular space provided generally coaxially with the central axis, wherein
- the generally annular ring slot passes the coaxial-converted microwave,
- a dielectric window propagates the microwave passed through the generally annular ring slot,
- a plasma is produced by the microwave propagated through the dielectric window,
- the cylindrical space has a length (A) parallel to the central axis,
- the annular space has a width (B) perpendicular to the central axis, and
- the length (A) is generally identical to the width (B).
7 more elements
A plasma generating apparatus, comprising:
- coaxial conversion means for coaxial-converting a microwave, the coaxial conversion means including:
- a coaxial introduction section having a generally cylindrical waveguide provided generally coaxially with a central axis and a core provided near the central axis, the coaxial introduction section propagating the microwave generally parallel to the central axis;
- and
- a coaxial conversion section where the microwave propagated through the coaxial introduction section is spread generally perpendicular to the central axis in a cylindrical space provided generally coaxially with the central axis and is guided to a plurality of slots through an annular space provided generally coaxially with the central axis, wherein
- the plurality of slots is provided on a generally identical circle as viewed from the central axis of the coaxial conversion means, the plurality of slots passing the coaxial-converted microwave,
- a dielectric member propagates the microwave passed through the plurality of slots and has a protrusion tapered toward a tip located opposite to the plurality of slots,
- a plasma is produced by the microwave propagated through the dielectric member,
- the cylindrical space has a length (A) parallel to the central axis,
- the annular space has a width (B) perpendicular to the central axis, and
- the length (A) is generally identical to the width (B).
7 more elements
Dependencies are inferred from the claim text.