Film forming apparatus and method, gas supply device and storage medium
AssigneeTokyo Electron Limited
InventorTakashi Kakegawa
Life of this patent
Estimating the term…
Abstract
A film forming apparatus is provided with a chamber which defines a processing space for performing a film forming process to a substrate a stage arranged in the chamber for mounting the substrate thereon; a substrate heating unit arranged on the stage for heating the substrate; a shower head which is arranged to face the stage and has many gas injecting holes; a gas supply unit for supplying cooling unit arranged above the shower head for cooling the shower head; and a shower head heating unit arranged above the cooling unit for heating the shower head through the cooling unit.
Claims20
A film forming apparatus comprising:
- a chamber which defines a processing space in which a film forming process is performed on a substrate;
- a stage arranged in the chamber on which the substrate is mounted, the stage including a substrate heating unit that heats the substrate;
- a shower head which is arranged to face the stage and has a plurality of gas injecting holes;
- a gas supply unit that supplies a processing gas into the chamber through the shower head;
- a cooling unit arranged above the shower head that cools the shower head;
- and
- a shower head heating unit arranged above the cooling unit that heats the shower head through the cooling unit,
- wherein the cooling unit includes a plurality of cooling fins and a cooling gas supply channel that supplies cooling gas to the corresponding cooling fins.
A gas supply device for use in a film forming apparatus including a chamber which defines a processing space for performing film forming process to a substrate and a stage arranged in the chamber for mounting the substrate thereon, the gas supply device comprising:
- a shower head which is arranged to face the stage and has a plurality of gas injecting holes;
- a cooling unit arranged above the shower head that cools the shower head;
- and
- a shower head heating unit arranged above the cooling unit that heats the shower head through the cooling unit,
- wherein the cooling unit includes a plurality of cooling fins and a cooling gas supply channel that supplies cooling gas to the corresponding cooling fins.
Dependencies are inferred from the claim text.