Epitaxially coated silicon wafer with 110 orientation and method for producing it

A method for producing an epitaxially coated silicon wafer comprising:

• a) pulling a silicon single crystal with <110> orientation according to Czochralski, using a seed crystal with <110> orientation, the geometrical axis of which is inclined by a specific angle relative to its real [110] crystal axis, such that the pulled <110>-oriented silicon single crystal also has a slight misorientation of its geometrical axis relative to its real [110] crystal axis;
• b) oriented cylindrical grinding of said silicon single crystal by determining the misorientation of the silicon single crystal that results after pulling, orienting the single crystal in a grinding machine, and grinding away an outer surface of the single crystal until the latter has a targeted, uniform diameter and the misorientation resulting from pulling of the single crystal is reduced or a targeted misorientation different from the misorientation resulting from pulling is established;
• c) slicing the cylindrically ground single crystal into wafers by means of a wire saw, whereby the silicon single crystal is fixed on a sawing strip tilted relative to the wire gang of the wire saw in such a way that the sawn wafers have a surface with a misoriented <110> crystal plane defined according to magnitude and direction to form sliced wafers;
• d) further processing of the sliced wafers by means of mechanical, chemical, or chemo-mechanical methods, by means of which the misorientation of the surface remains largely unchanged;
• and
• e) applying an epitaxial layer to the wafer,
• wherein the <110> direction is tilted away by the angle θ from the normal to the wafer surface and the projection of the tilted <110> direction forms an angle φ with the direction <−110> in the wafer plane, wherein 0≦θ≦3° and 45°≦φ≦90°, and for all symmetrically equivalent directions.