Rotary flexure and air bearing support for rotary indexing system
AssigneeElectro Scientific Industries, Inc.
InventorMark Kosmowski
Life of this patent
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Abstract
A highly position-stabilized indexable table or “dial” in which the dial is supported relative to a steel surface on a frame by one or more air bearings. A flexure mechanically connects the indexing motor to the dial in such a way as to be torsionally non-compliant, but axially compliant to decouple the dial from the motor shaft along the Z-axis. In one embodiment, the air bearings are mounted to the frame at uniformly angularly displaced positions under the dial. In another embodiment, the bearings are partially integrated into the dial. Negative (suction) preload can be used in either embodiment to increase air bearing stiffness and/or to allow inverted processing; i.e., mounting part fixtures on an undersurface of the dial.
Claims7
An indexable dial system for translating workpieces in and out of a processing station comprising:
- a dial having an axis of rotation;
- a motor for selectively indexing the dial about said axis;
- air bearing means supporting said dial;
- and
- a flexure mechanically connecting said motor to said dial, said flexure being essentially torsionally non-compliant about said axis but compliant along said axis.
Dependencies are inferred from the claim text.