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US 8,130,072 B2Granted
Vanadium oxide thermal microprobes
AssigneePalo Alto Research Center Incorporated
InventorsDirk De Bruyker, Michal V. Wolkin
Life of this patent
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Abstract
A temperature probe includes a substrate, a cantilever body portion formed on the substrate, having an anchor portion held in contact to the substrate and a free end portion extending out of the surface of the substrate, and a sputter-deposited thermistor sensor portion located at the free end portion of the cantilever body portion.
Claims19
A temperature probe comprising:
- a substrate;
- a cantilever body portion formed on the substrate by sputter deposition, including an anchor portion held in contact to the substrate and a free end portion extending out of the surface of the substrate;
- and
- a thermistor sensor portion located at the free end portion of the cantilever body portion, wherein the thermistor sensor portion is comprised of a sputter-deposited semiconductor material.
1 more element
A method for manufacturing a temperature probe comprising:
- depositing a thin film of a sacrificial material on a substrate;
- patterning the sacrificial material;
- depositing a first layer of vanadium oxide;
- depositing a second layer of vanadium oxide;
- patterning the deposited first and second layers of vanadium oxide;
- and
- etching the sacrificial layer to release the patterned first and second layers of vanadium oxide.
4 more elements
A method for manufacturing a temperature probe comprising;
- depositing a thin film of a sacrificial material on a substrate;
- patterning the sacrificial layer;
- depositing a dielectric layer;
- patterning the dielectric layer;
- depositing a thermistor material;
- depositing a stressed metal layer;
- patterning the thermistor layer and the stressed metal layer, wherein the thermistor and stressed metal layer are in contact;
- depositing a second dielectric layer;
- depositing a thin gold layer;
- etching away a portion of the sacrificial layer, releasing a cantilever structure;
- and
- etching another portion of the sacrificial layer to release patterned first and second layers of vanadium oxide.
9 more elements
Dependencies are inferred from the claim text.