Integrated circuit including at least six linear-shaped conductive structures forming gate electrodes and including four conductive contacting structures having at least two different connection distances
A semiconductor device includes a substrate portion having a plurality of diffusion regions defined therein in a non-symmetrical manner relative to a virtual line defined to bisect the substrate portion. The semiconductor device includes a gate electrode level region including a number of conductive features defined to extend in only a first parallel direction. Adjacent ones of the conductive features that share a common line of extent in the first parallel direction are fabricated from respective originating layout features separated by an end-to-end spacing having a size that is substantially equal across the gate electrode level region and is minimized to an extent allowed by a semiconductor device manufacturing capability. Conductive features are defined along at least four different virtual lines of extent in the first parallel direction. A width of the conductive features is less than a wavelength of light used in a photolithography process for their fabrication.
Drawings
Claims44
An integrated circuit, comprising:
a substrate region;
a gate electrode level region formed above the substrate region, the gate electrode level region having a radius of up to about 965 nanometers as measured in any direction parallel to the substrate region, the gate electrode level region including at least six linear-shaped conductive structures each formed to extend lengthwise in a first direction, the at least six linear-shaped conductive structures including—
a first linear-shaped conductive structure including a first gate portion that forms a gate electrode of a first transistor of a first transistor type and a second gate portion that forms a gate electrode of a first transistor of a second transistor type, the first linear-shaped conductive structure also including a non-gate portion that extends in the first direction between the first and second gate portions of the first linear-shaped conductive structure,
a second linear-shaped conductive structure including a gate portion that forms a gate electrode of a second transistor of the first transistor type, the second linear-shaped conductive structure also including a non-gate portion that extends in the first direction away from the gate portion of the second linear-shaped conductive structure,
a third linear-shaped conductive structure including a gate portion that forms a gate electrode of a second transistor of the second transistor type, the third linear-shaped conductive structure also including a non-gate portion that extends in the first direction away from the gate portion of the third linear-shaped conductive structure,
a fourth linear-shaped conductive structure including a gate portion that forms a gate electrode of a third transistor of the first transistor type, the fourth linear-shaped conductive structure also including a non-gate portion that extends in the first direction away from the gate portion of the fourth linear-shaped conductive structure,
a fifth linear-shaped conductive structure including a gate portion that forms a gate electrode of a third transistor of the second transistor type, the fifth linear-shaped conductive structure also including a non-gate portion that extends in the first direction away from the gate portion of the fifth linear-shaped conductive structure,
a sixth linear-shaped conductive structure including a first gate portion that forms a gate electrode of a fourth transistor of the first transistor type and a second gate portion that forms a gate electrode of a fourth transistor of the second transistor type, the sixth linear-shaped conductive structure also including a non-gate portion that extends in the first direction between the first and second gate portions of the sixth linear-shaped conductive structure;
a first conductive contacting structure formed to physically connect to the second linear-shaped conductive structure, wherein the first conductive contacting structure is positioned a first connection distance away from the gate portion that forms the gate electrode of the second transistor of the first transistor type as measured in the first direction;
a second conductive contacting structure formed to physically connect to the third linear-shaped conductive structure, wherein the second conductive contacting structure is positioned a second connection distance away from the gate portion that forms the gate electrode of the second transistor of the second transistor type as measured in the first direction;
a third conductive contacting structure formed to physically connect to the fourth linear-shaped conductive structure, wherein the third conductive contacting structure is positioned a third connection distance away from the gate portion that forms the gate electrode of the third transistor of the first transistor type as measured in the first direction;
and
a fourth conductive contacting structure formed to physically connect to the fifth linear-shaped conductive structure, wherein the fourth conductive contacting structure is positioned a fourth connection distance away from the gate portion that forms the gate electrode of the third transistor of the second transistor type as measured in the first direction,
wherein at least two of the first, second, third, and fourth connection distances are different.
4 Apr 2027Estimated · howhide20 years from earliest known nonprovisional domestic filing plus recorded patent term adjustment, including 28 days of adjustment. Maintenance-fee lapses, terminal disclaimers and statutory extensions have not been checked. The continuity chain may be incomplete; this is not an enforceability determination.
Characterised by the conductor: aspects related to lithography, isolation or planarisation of the conductor
Life of this patent
About 5 months of term left · ends 4 Apr 2027 (estimated)
Priority9 Mar 2006
Filed25 Sep 2009
Published21 Jan 2010
Granted6 Mar 2012
Today12 Oct 2026
Term ends4 Apr 2027
Priority9 Mar 2006
Granted6 Mar 2012
Term ends4 Apr 2027
Priority claimedParent application 60/781,288
Application filedUS 12/567,555
PublishedUS 2010/0012982 A1
GrantedUS 8,129,751 B2
Assigned to Rpx Corporationassignment of assignor's interest
Assigned to Barings Finance LLC, AS Collateral Agentpatent security agreement
Assigned to Rpx Corporationrelease of lien on patents
TodayWithin its term
Term endsEstimated, includes 28 days of adjustment
Description14,086 words
Summary2,974 words
#This application is related to each application identified in the table below. The disclosure of each application identified in the table below is incorporated herein by reference in its entirety.
#Application Filing Title No. Date Semiconductor Device with Dynamic 12/013,342 Jan. 11, 2008 Array Section Methods for Designing Semiconductor 12/013,356 Jan. 11, 2008 Device with Dynamic Array Section Methods for Defining Dynamic Array 12/013,366 Jan. 11, 2008 Section with Manufacturing Assurance Halo and Apparatus Implementing the Same Enforcement of Semiconductor 12/363,705 Jan. 30, 2009 Structure Regularity for Localized Transistors and Interconnect Cross-Coupled Transistor Layouts Using 12/402,465 Mar. 11, 2009 Linear Gate Level Features Defining and Using Contact Grids in 12/399,948 Mar. 7, 2009 Circuit Using Dynamic Array Architecture Methods for Multi-Wire Routing and 12/411,249 Mar. 25, 2009 Apparatus Implementing Same Co-Optimized Nano-Patterns for 12/484,130 Jun. 12, 2009 Integrated Circuit Design Methods for Defining and Utilizing Sub- 12/479,674 Jun. 5, 2009 Resolution Features in Linear Topology Optimizing Layout of Irregular 12/481,445 Jun. 9, 2009 Structures in Regular Layout Context Methods for Cell Phasing in Grid-Based 12/497,052 Jul. 2, 2009 Architecture and Apparatus Implementing Same Use of Oversized Contacts and Vias in a 12/466,335 May 14, 2009 Linearly Constrained Topology Use of Oversized Contacts and Vias in a 12/466,341 May 14, 2009 Linearly Constrained Topology Methods for Controlling Microloading 12/512,932 Jul. 30, 2009 Variation in Semiconductor Wafer Layout and Fabrication Circuitry and Layouts for XOR and 12/435,672 May 5, 2009 XNOR Logic Semiconductor Device Layout Having 12/561,207 Sep. 16, 2009 Restricted Layout Region Including Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Corresponding Non-Symmetric Diffusion Regions Semiconductor Device Layout Including 12/561,216 Sep. 16, 2009 Cell Layout Having Restricted Gate Electrode Level Layout with Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Corresponding Non-Symmetric Diffusion Regions Semiconductor Device Layout Having 12/561,220 Sep. 16, 2009 Restricted Layout Region Including Rectangular Shaped Gate Electrode Layout Features and Equal Number of PMOS and NMOS Transistors Semiconductor Device Layout Including 12/561,224 Sep. 16, 2009 Cell Layout Having Restricted Gate Electrode Level Layout with Rectangular Shaped Gate Electrode Layout Features and Equal Number of PMOS and NMOS Transistors Semiconductor Device Layout Having 12/561,229 Sep. 16, 2009 Restricted Layout Region Including Rectangular Shaped Gate Electrode Layout Features and At Least Eight Transistors Semiconductor Device Layout Including 12/561,234 Sep. 16, 2009 Cell Layout Having Restricted Gate Electrode Level Layout with Rectangular Shaped Gate Electrode Layout Features and At Least Eight Transistors Semiconductor Device Portion Having 12/561,238 Sep. 16, 2009 Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks and Having Corresponding Non- Symmetric Diffusion Regions Semiconductor Device Portion Having 12/561,243 Sep. 16, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks and Having Corresponding Non-Symmetric Diffusion Regions Semiconductor Device Portion Having 12/561,246 Sep. 16, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks and Having Corresponding Non-Symmetric Diffusion Regions Semiconductor Device Portion Having 12/561,247 Sep. 16, 2009 Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Having Equal Number of PMOS and NMOS Transistors Semiconductor Device Portion Having 12/561,031 Sep. 18, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Having Equal Number of PMOS and NMOS Transistors Semiconductor Device Portion Having 12/563,042 Sep. 18, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Having Equal Number of PMOS and NMOS Transistors Semiconductor Device Portion Having 12/563,051 Sep. 18, 2009 Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Having At Least Eight Transistors Semiconductor Device Portion Having 12/563,056 Sep. 18, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Having At Least Eight Transistors Semiconductor Device Portion Having 12/563,061 Sep. 18, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Having At Least Eight Transistors Semiconductor Device Layout Having 12/563,063 Sep. 18, 2009 Restricted Layout Region Including Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to-End Spacing with Corresponding Non-Symmetric Diffusion Regions Semiconductor Device Layout Including 12/563,066 Sep. 18, 2009 Cell Layout Having Restricted Gate Electrode Level Layout with Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to- End Spacing with Corresponding Non- Symmetric Diffusion Regions Semiconductor Device Layout Having 12/563,074 Sep. 18, 2009 Restricted Layout Region Including Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to- End Spacing and Equal Number of PMOS and NMOS Transistors Semiconductor Device Layout Including 12/563,076 Sep. 18, 2009 Cell Layout Having Restricted Gate Electrode Level Layout with Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Equal Number of PMOS and NMOS Transistors Semiconductor Device Layout Having 12/563,077 Sep. 18, 2009 Restricted Layout Region Including Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to- End Spacing and At Least Eight Transistors Semiconductor Device Layout Including 12/567,528 Sep. 25, 2009 Cell Layout Having Restricted Gate Electrode Level Layout with Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and At Least Eight Transistors Semiconductor Device Portion Having 12/567,542 Sep. 25, 2009 Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to-End Spacing and Having Corresponding Non- Symmetric Diffusion Regions Semiconductor Device Portion Having 12/567,565 Sep. 25, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to-End Spacing and Having Corresponding Non-Symmetric Diffusion Regions Semiconductor Device Portion Having 12/567,574 Sep. 25, 2009 Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Having Equal Number of PMOS and NMOS Transistors Semiconductor Device Portion Having 12/567,586 Sep. 25, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to- End Spacing and Having Equal Number of PMOS and NMOS Transistors Semiconductor Device Portion Having 12/567,597 Sep. 25, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Having Equal Number of PMOS and NMOS Transistors Semiconductor Device Portion Having 12/567,602 Sep. 25, 2009 Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Having At Least Eight Transistors Semiconductor Device Portion Having 12/567,609 Sep. 25, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to- End Spacing and Having At Least Eight Transistors Semiconductor Device Portion Having 12/567,616 Sep. 25, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Having At Least Eight Transistors Layout of Cell of Semiconductor Device 12/567,623 Sep. 25, 2009 Having Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks Layout of Cell of Semiconductor Device 12/567,630 Sep. 25, 2009 Having Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Corresponding p-type and n- type Diffusion Regions Separated by Central Inactive Region Layout of Cell of Semiconductor Device 12/567,634 Sep. 25, 2009 Having Rectangular Shaped Gate Electrode Layout Features and Equal Number of PMOS and NMOS Transistors Layout of Cell of Semiconductor Device 12/567,641 Sep. 25, 2009 Having Rectangular Shaped Gate Electrode Layout Features and Equal Number of PMOS and NMOS Transistors with Corresponding p-type and n-type Diffusion Regions Separated by Central Inactive Region Layout of Cell of Semiconductor Device 12/567,648 Sep. 25, 2009 Having Rectangular Shaped Gate Electrode Layout Features and At Least Eight Transistors Layout of Cell of Semiconductor Device 12/567,654 Sep. 25, 2009 Having Rectangular Shaped Gate Electrode Layout Features and At Least Eight Transistors with Corresponding p- type and n-type Diffusion Regions Separated by Central Inactive Region Cell of Semiconductor Device Having 12/571,343 Sep. 30, 2009 Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks Cell of Semiconductor Device Having 12/571,351 Sep. 30, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks Cell of Semiconductor Device Having 12/571,357 Sep. 30, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks Cell of Semiconductor Device Having 12/571,998 Oct. 1, 2009 Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Equal Number of PMOS and NMOS Transistors Cell of Semiconductor Device Having 12/572,011 Oct. 1, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Equal Number of PMOS and NMOS Transistors Cell of Semiconductor Device Having 12/572,022 Oct. 1, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and Equal Number of PMOS and NMOS Transistors Cell of Semiconductor Device Having 12/572,046 Oct. 1, 2009 Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and At Least Eight Transistors Cell of Semiconductor Device Having 12/572,055 Oct. 1, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and At Least Eight Transistors Cell of Semiconductor Device Having 12/572,061 Oct. 1, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Rectangular Shaped Gate Electrode Layout Features and At Least Eight Transistors Layout of Cell of Semiconductor Device 12/572,068 Oct. 1, 2009 Having Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to-End Spacing Layout of Cell of Semiconductor Device 12/572,077 Oct. 1, 2009 Having Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to-End Spacing and Having Corresponding p-type and n-type Diffusion Regions Separated by Central Inactive Region Layout of Cell of Semiconductor Device 12/572,091 Oct. 1, 2009 Having Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Having Equal Number of PMOS and NMOS Transistors Layout of Cell of Semiconductor Device 12/572,194 Oct. 1, 2009 Having Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Having Equal Number of PMOS and NMOS Transistors and Having Corresponding p- type and n-type Diffusion Regions Separated by Central Inactive Region Layout of Cell of Semiconductor Device 12/572,201 Oct. 1, 2009 Having Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Having At Least Eight Transistors Layout of Cell of Semiconductor Device 12/572,212 Oct. 1, 2009 Having Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Having At Least Eight Transistors and Having Corresponding p-type and n-type Diffusion Regions Separated by Central Inactive Region Cell of Semiconductor Device Having 12/572,218 Oct. 1, 2009 Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to-End Spacing Cell of Semiconductor Device Having 12/572,221 Oct. 1, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to-End Spacing Cell of Semiconductor Device Having 12/572,225 Oct. 1, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined Along At Least Four Gate Electrode Tracks with Minimum End-to-End Spacing Cell of Semiconductor Device Having 12/572,228 Oct. 1, 2009 Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Equal Number of PMOS and NMOS Transistors Cell of Semiconductor Device Having 12/572,229 Oct. 1, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to- End Spacing and Equal Number of PMOS and NMOS Transistors Cell of Semiconductor Device Having 12/572,232 Oct. 1, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and Equal Number of PMOS and NMOS Transistors Cell of Semiconductor Device Having 12/572,237 Oct. 1, 2009 Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and At Least Eight Transistors Cell of Semiconductor Device Having 12/572,239 Oct. 1, 2009 Sub-Wavelength-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to- End Spacing and At Least Eight Transistors Cell of Semiconductor Device Having 12/572,243 Oct. 1, 2009 Sub-193 Nanometers-Sized Gate Electrode Conductive Structures Formed from Linear Shaped Gate Electrode Layout Features Defined with Minimum End-to-End Spacing and At Least Eight Transistors
#A push for higher performance and smaller die size drives the semiconductor industry to reduce circuit chip area by approximately 50% every two years. The chip area reduction provides an economic benefit for migrating to newer technologies. The 50% chip area reduction is achieved by reducing the feature sizes between 25% and 30%. The reduction in feature size is enabled by improvements in manufacturing equipment and materials. For example, improvement in the lithographic process has enabled smaller feature sizes to be achieved, while improvement in chemical mechanical polishing (CMP) has in-part enabled a higher number of interconnect layers.
Brief description of the drawings23 figures
#FIG. 1 is an illustration showing a number of neighboring layout features and a representation of light intensity used to render each of the layout features, in accordance with one embodiment of the present invention;
#FIG. 2 is an illustration showing a generalized stack of layers used to define a dynamic array architecture, in accordance with one embodiment of the present invention;
#FIG. 3A is an illustration showing an exemplary base grid to be projected onto the dynamic array to facilitate definition of the restricted topology, in accordance with one embodiment of the present invention;
Detailed description10,454 words
#In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some or all of these specific details. In other instances, well known process operations have not been described in detail in order not to unnecessarily obscure the present invention.
#Generally speaking, a dynamic array architecture is provided to address semiconductor manufacturing process variability associated with a continually increasing lithographic gap. In the area of semiconductor manufacturing, lithographic gap is defined as the difference between the minimum size of a feature to be defined and the wavelength of light used to render the feature in the lithographic process, wherein the feature size is less than the wavelength of the light. Current lithographic processes utilize a light wavelength of 193 nm. However, current feature sizes are as small as 65 nm and are expected to soon approach sizes as small as 45 nm. With a size of 65 nm, the shapes are three times smaller than the wavelength of the light used to define the shapes. Also, considering that the interaction radius of light is about five light wavelengths, it should be appreciated that shapes exposed with a 193 nm light source will influence the exposure of shapes approximately 5*193 nm (965 nm) away. When considering the 65 nm sized features with respect to 90 nm sized features, it should be appreciated that approximately two times as many 65 nm sizes features may be within the 965 nm interaction radius of the 193 nm light source as compared to the 90 nm sized features.
#Due to the increased number of features within the interaction radius of the light source, the extent and complexity of light interference contributing to exposure of a given feature is significant. Additionally, the particular shapes associated with the features within the interaction radius of the light source weighs heavily on the type of light interactions that occur. Traditionally, designers were allowed to define essentially any two-dimensional topology of feature shapes so long as a set of design rules were satisfied. For example, in a given layer of the chip, i.e., in a given mask, the designer may have defined two-dimensionally varying features having bends that wrap around each other. When such two-dimensionally varying features are located in neighboring proximity to each other, the light used to expose the features will interact in a complex and generally unpredictable manner. The light interaction becomes increasingly more complex and unpredictable as the feature sizes and relative spacing become smaller.