Plasma supply device
AssigneeHUETTINGER Elektronik GmbH + Co. KG
InventorsThomas Kirchmeier, Hans-Juergen Windisch, Hanns-Joachim Knaus, Michael Glueck, Gerd Hintz
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Abstract
A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasma supply device includes at least one inverter connected to a DC power supply, which inverter has at least one switching element, and an output network. The output network is arranged on a printed circuit board. The output network can therefore be designed low priced and accurately.
Claims29
A plasma supply device comprising:
- at least one inverter configured to connect to a DC power supply;
- and
- at least one output network electrically coupled to the at least one inverter and comprising:
- an output transformer having two magnetically coupled windings;
- and
- one or more impedance components;
- wherein the output transformer windings and the one or more impedance components are all formed by a multilayer printed circuit board.
A plasma supply system comprising:
- a DC power supply;
- at least two plasma supply devices, wherein each plasma supply device comprises:
- at least one inverter connected to the DC power supply;
- and
- at least one output network electrically coupled to the at least one inverter, the at least one output network comprising:
- an output transformer having two magnetically coupled windings;
- and
- one or more impedance components;
- wherein the output transformer windings and the one or more impedance components are all formed by a multilayer printed circuit board;
- and
- at least one coupler that combines output powers of the at least two plasma supply devices.
Dependencies are inferred from the claim text.