Liquid ejecting head, liquid ejecting apparatus, and actuator

A liquid ejecting head comprising:

• a flow passage forming substrate comprising a plurality of pressure generating chambers;
• a piezoelectric element comprising a lower electrode, a piezoelectric layer formed above the lower electrode, and an upper electrode formed above the piezoelectric layer, wherein end faces of the lower electrode are covered with the piezoelectric layer, and wherein the end faces taper downward, and
• an insulator film composed of titanium oxide,
• wherein the piezoelectric element is disposed on the substrate with the insulator film interposed therebetween;
• wherein the lower electrode comprises an orientation control layer composed of a lanthanum nickel oxide and the piezoelectric layer is formed on the orientation control layer;
• and
• the lanthanum nickel oxide and at least a part of the piezoelectric layer are formed of perovskite crystals having a (111) preferred orientation.

An actuator comprising:

• a diaphragm disposed on a substrate;
• and
• a piezoelectric element disposed on the diaphragm, the piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode, wherein end faces of the lower electrode are covered with the piezoelectric layer, and wherein the end faces taper downward,
• wherein the piezoelectric layer tapers downward at its ends,
• the piezoelectric layer has a larger width than the lower electrode to cover end faces of the lower electrode,
• the diaphragm has a top layer formed of a titanium oxide (TiOx) insulator film, the lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer, and
• the orientation control layer and at least part of the piezoelectric layer disposed on the orientation control layer are formed of perovskite crystals having a (111) preferred orientation.

An Actuator comprising:

• a diaphragm;
• an insulator film composed of titanium oxide;
• and
• a piezoelectric element disposed on the diaphragm, the piezoelectric element comprising a lower electrode, a piezoelectric layer formed above the lower electrode, and an upper electrode formed above the piezoelectric layer, wherein the lower electrode is formed above the insulator film, wherein end faces of the lower electrode are covered with the piezoelectric layer, and wherein the end faces taper downward;
• wherein the lower electrode includes an orientation control layer composed of a lanthanum nickel oxide and the piezoelectric layer is formed on the orientation control layer;
• and
• the lanthanum nickel oxide and at least a part of the piezoelectric layer are formed of perovskite crystals having a (111) preferred orientation.