Reflection type encoder, scale thereof and method for producing scale

A reflection type encoder, which receives a plurality of light-receiving signals from a single scale, including:

• at least one light source;
• a scale having a plurality of sets of patterns formed thereon to which light is irradiated from the at least one light source;
• and
• a light-receiving element for receiving light reflected from each of the plurality of sets of patterns, wherein
• a plurality of sets of patterns each having a same thickness in the same set but different thicknesses between different sets are formed on a single track of the scale by using a dielectric substance, light of a plurality of wavelengths each having a different brightness in accordance with a different thickness of the dielectric substance is irradiated from the at least one light source, and light-receiving signals are obtained for each respective set of patterns having a same thickness of the dielectric substance, and
• wherein the dielectric substance layer has regions of different height and each of the plurality of wavelengths of the at least one light source is configured to interact with a different region of the regions of different height to provide distinct positional reference information.

A method for producing a scale, comprising the steps of, when forming a plurality of sets of patterns each having a same thickness in the same set but different thicknesses between the different sets on a single track of the scale by using a dielectric substance:

• forming a light reflection pattern on a scale substrate;
• forming a dielectric substance layer with a first height thereon;
• forming and patterning a first resist pattern thereon;
• etching the dielectric substance layer of the first resist pattern opening portion up to a second height;
• forming and patterning a second resist pattern thereon;
• etching the dielectric substance layer of the second resist pattern opening portion;
• and
• removing the second resist pattern, wherein
• the first height is configured to interact with a wavelength emitted from at least one light source emitting a plurality of wavelengths, and
• the second height is configured to interact with another wavelength emitted from the at least one light source emitting the plurality of wavelengths, such that the interactions provide distinct positional reference information.

A method for producing a scale, comprising the steps of, when forming a plurality of sets of patterns each having a same thickness in the same set but different thicknesses between different sets on a single track of the scale by using a dielectric substance:

• forming a light reflection layer on a scale substrate;
• forming and patterning a first resist pattern thereon;
• lifting off a dielectric substance layer of a second height at the first resist pattern opening portion;
• removing the first resist pattern;
• forming and patterning a second resist pattern thereon;
• lifting off a dielectric substance layer of a first height at the second resist pattern opening portion;
• and
• removing the second resist pattern, wherein
• the first height is configured to interact with a wavelength emitted from at least one light source emitting a plurality of wavelengths, and
• the second height is configured to interact with another wavelength emitted from the at least one light source emitting the plurality of wavelengths, such that the interactions provide distinct positional reference information.