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US 8,127,616 B1Granted
Elevated temperature pressure sensor
OwnerReed Carver, Joseph Snyder +2inventors
InventorsReed Carver, Joseph Snyder, Frederick J. Lisy, Troy Prince
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Abstract
The present invention relates, in general, to pressure sensors capable of operating at high temperatures. The present invention further relates to a high temperature pressure sensor with an improved gage factor. The present invention still further provides a pressure sensor with a smaller sized diaphragm, which is capable of reading higher pressures. The present invention also provides a method and sensor for detecting strain using shape memory alloys.
Claims20
A pressure sensor comprising
- a substrate with an opening having a maximum cross-sectional dimension of less than about 1.0 mm;
- a flexible diaphragm;
- and
- a strain sensing element
- wherein the flexible diaphragm has a thickness of less than 350 um extending across the opening of the substrate and the pressure sensor is capable of measuring pressures of greater than 3000 psi without premature failure.
2 more elements
A pressure sensor comprising
- a substrate with an opening having a maximum cross-sectional dimension of less than about 1.0 mm;
- a flexible diaphragm;
- a strain sensing element;
- and
- a heating element for stabilization of the sensing element for high temperature engine applications
- wherein the pressure sensor is capable of measuring pressures of greater than 1000 psi without premature failure.
3 more elements
A pressure sensor comprising
- a substrate with an opening;
- a flexible a diaphragm across the opening;
- and
- a strain sensing element
- wherein the pressure sensor is capable of measuring pressures of less than about 300 psi and greater than about 1000 psi without premature failure.
2 more elements
Dependencies are inferred from the claim text.