Platforms, apparatuses, systems and methods for processing and analyzing substrates
AssigneeMicronic Mydata AB
InventorsLars Stiblert, Torbjörn Sandström, Jarek Luberek, Tomas Lock
Life of this patent
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Abstract
Devices and methods for manufacturing displays, solar panels and other devices using larger size workpieces are provided. The workpiece is rolled into a cylinder, thereby reducing the physical size by a factor of 3 in one dimension. The stages on which the workpieces are rolled have a cylindrical shape, which allows a more robust and/or compact movement of the glass, reduced machine weight. The workpieces are relatively thin, more flexible, and are rolled onto a cylinder with a diameter of about 1 meter.
Claims22
A processing platform configured to write a pattern on a nominally flat workpiece larger than about 5 m2 and less than about 1 mm thick, the pattern being defined in a first coordinate system on the workpiece in a flat state, the processing platform comprising:
- at least one writing tool;
- a stage configured to clamp the workpiece to a cylinder, thereby bending the workpiece to a curved state in which the workpiece is to be written when rotated relative to the at least one writing tool;
- a position controller configured to control movements of the at least one writing tool relative to the stage in a second coordinate system on the curved surface of the workpiece;
- a metrology system configured to provide metrology information regarding two-dimensional deviations based on an ideal shape of the workpiece, an ideal shape of a surface of the cylinder, and a relative movement between the workpiece and the cylinder;
- and
- a processor configured to convert the first coordinate system to the second coordinate system;
- wherein
- the processor corrects for the two-dimensional deviations using the metrology information when converting the first coordinate system to the second coordinate system.
Dependencies are inferred from the claim text.