Method of manufacturing semiconductor nanowire sensor device and semiconductor nanowire sensor device manufactured according to the method

A method of manufacturing a semiconductor nanowire sensor device, the method comprising:

• preparing a first conductive type single crystal semiconductor substrate;
• forming a line-shaped first conductive type single crystal pattern from the first conductive type single crystal semiconductor substrate;
• forming second conductive type epitaxial patterns on both sidewalls of the first conductive type single crystal pattern;
• and
• forming source and drain electrodes at both ends of the second conductive type epitaxial patterns,
• wherein the forming of the second conductive type epitaxial patterns comprises:
• forming a second conductive type epitaxial layer using an epitaxial growth process, on an entire surface of the first conductive type single crystal semiconductor substrate and an entire surface of the first conductive type single crystal pattern;
• and
• performing a blanket anisotropic etch process on the second conductive type epitaxial layer to form the second conductive type epitaxial patterns on the both sidewalls of the first conductive type single crystal pattern.