Gas-phase functionalization of surfaces including carbon-based surfaces
AssigneePresident and Fellows of Harvard College
InventorsRoy G. Gordon, Damon B. Farmer, Charles M. Marcus, James R. Williams
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Abstract
The invention provides methods functionalizing a planar surface of a graphene layer, a graphite surface, or microelectronic structure. The graphene layer, graphite surface, or planar microelectronic structure surface is exposed to at least one vapor including at least one functionalization species that non-covalently bonds to the graphene layer, a graphite surface, or planar microelectronic surface while providing a functionalization layer of chemically functional groups, to produce a functionalized graphene layer, graphite surface, or planar microelectronic surface.
Claims25
A method for functionalizing a graphene layer comprising:
- exposing the graphene layer to at least one vapor including at least one functionalization species, selected from the group consisting of NO2 and CH3ONO, that non-covalently bonds to the graphene layer while providing a functionalization layer of chemically functional groups, to produce a functionalized graphene layer;
- and
- exposing the graphene layer to at least one vapor stabilization species to form a stabilization layer that stabilizes the functionalization layer against desorption from the graphene layer while providing chemically functional groups at the graphene layer, to produce a stabilized graphene layer.
A method for functionalizing a graphene layer comprising:
- exposing the graphene layer to at least one vapor including at least one functionalization species that non-covalently bonds to the graphene layer while providing a functionalization layer of chemically functional groups, to produce a functionalized graphene layer;
- exposing the functionalized graphene layer to at least one vapor stabilization species to form a stabilization layer that stabilizes the functionalization layer against desorption from the graphene layer while providing chemically functional groups at the graphene layer, to produce a stabilized graphene layer;
- and
- forming an electrically insulating layer over the stabilization layer.
Dependencies are inferred from the claim text.