Particulate size classification apparatus and method
AssigneeFujitsu Limited
InventorShintaro Sato
Life of this patent
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Abstract
Particulates called nanoparticles (principally having a diameter of 10 nm or less) are reliably and easily according to size with high throughput. An impactor includes a particulate size classifying chamber provided with an exhaust port for particulates, a nozzle ejecting to the inside of the particulate size classifying chamber a carrier gas containing particulates to be classified, and a trapping plate as particulate trapping unit provided in the particulate size classifying chamber and selectively trapping particulates ejected from the nozzle.
Claims19
A particulate size classification apparatus comprising:
- a particulate size classifying chamber provided with an exhaust port for particulates;
- a particulate introducing unit having a nozzle ejecting to the inside of the particulate size classifying chamber a carrier gas containing particulates to be classified;
- and
- a particulate trapping unit provided in the particulate size classifying chamber and selectively trapping particulates ejected from the nozzle,
- wherein among the particulates ejected from the nozzle, particulates made uniform in size by not being trapped by the particulate trapping unit are ejected from the exhaust port;
- and
- wherein the particulate introducing unit has a particulate introduction pipe introducing the carrier gas into the particulate size classifying chamber, and
- the nozzle has a plurality of ejection ports having orifice diameters of different sizes, and is placed separately from the particulate introduction pipe so that the selected ejection port is connected to the particulate introduction pipe.
A particulate size classification method,
- wherein the particulate introducing unit has a particulate introduction pipe introducing a nozzle and a carrier gas into a particulate size classifying chamber, and
- the nozzle has a plurality of ejection ports having orifice diameters of different sizes, and is placed separately from the particulate introduction pipe so that the selected ejection port is connected to the particulate introduction pipe, and
- wherein the carrier gas containing particulates to be classified is ejected to the inside of the particulate size classifying chamber from the nozzle, particulates are selectively trapped by particulate trapping unit provided in the particulate size classifying chamber, and particulates made uniform in size by not being trapped by the particulate trapping unit are collected.
Dependencies are inferred from the claim text.