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US 8,110,991 B2Granted
Phase and frequency control of a radio frequency generator from an external source
AssigneeMKS Instruments, Inc.
InventorDavid J. Coumou
Life of this patent
Estimating the term…
Abstract
Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.
Claims15
A radio frequency (RF) generator comprising:
- a RF power source;
- a sensor coupled to the RF power source;
- a sensor signal processing unit including a controller coupled to a derivative function component and coupled to the power source and to the sensor, the sensor signal processing unit adapted to receive an input from an external RF generator and to generate a control signal to control at least one of phase or frequency of the RF generator, the signal processing unit being operable to generate the control signal,
- wherein the sensor signal processing unit includes a field programmable gate array (FPGA) unit and a digital signal processing unit and wherein the FPGA unit is operable to receive a phase and frequency input signal.
1 more element
A radio frequency (RF) generator system comprising:
- a first RF generator generating an output;
- and
- a second RF generator, the second RF generator including:
- a RF power source;
- a sensor coupled to the power source;
- and
- a sensor signal processing unit coupled to the power source and to the sensor, the sensor signal processing unit adapted to receive the output from the first RF generator and to generate a control signal to control at least one of phase or frequency of the second RF generator.
4 more elements
Dependencies are inferred from the claim text.