Micro hemispheric resonator gyro
AssigneeNorthrop Grumman Guidance and Electronics Company, Inc.
InventorRobert E. Stewart
Life of this patent
Estimating the term…
Abstract
One embodiment is a micro hemispheric resonator gyro having: a plurality of pickoff and forcer electrodes; a hemispheric resonator; a guard ring having first and second opposed sides, the guard ring containing the plurality of pickoff and forcer electrodes, and the hemispheric resonator; a top cover operatively coupled to the first side of the guard ring; and a bottom cover operatively coupled to the second side of the guard ring; wherein the plurality of pickoff and forcer electrodes, the hemispheric resonator, the guard ring, the top cover and the bottom cover form a micro hemispheric resonator gyro.
Claims16
An apparatus, comprising:
- a plurality of pickoff and forcer electrodes;
- a hemispheric resonator;
- a guard ring having first and second opposed sides, the guard ring encompassing the plurality of pickoff and forcer electrodes, and the hemispheric resonator;
- a top cover operatively coupled to the first side of the guard ring;
- and
- a bottom cover operatively coupled to the second side of the guard ring;
- wherein the plurality of pickoff and forcer electrodes, the guard ring, the top cover and the bottom cover may be formed from single crystal silicon;
- and
- wherein the plurality of pickoff and forcer electrodes, the hemispheric resonator, the guard ring, the top cover and the bottom cover form a batch-fabricated micro hemispheric resonator gyro.
A batch-fabricated micro hemispheric resonator gyro, comprising:
- at least first, second and third silicon layers;
- the first layer having a top cover;
- the second silicon layer having a plurality of pickoff and forcer electrodes, a hemispheric resonator and a guard ring having first and second opposed sides, the guard ring containing the plurality of pickoff and forcer electrodes, and the hemispheric resonator;
- the third layer having a bottom cover;
- the top cover operatively coupled to the first side of the guard ring;
- the bottom cover operatively coupled to the second side of the guard ring;
- the plurality of pickoff and forcer electrodes, the guard ring, the top cover and the bottom cover being formed from single crystal silicon.
Dependencies are inferred from the claim text.