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US 8,106,654 B2Granted
Magnetic sensor integrated circuit device and method
AssigneeInfineon Technologies AG
InventorsHorst Theuss, Helmut Wietschorke
Life of this patent
Estimating the term…
Abstract
An sensor includes a substrate with a magnetic field sensor mounted on the substrate. The magnetic field sensor has a first surface defining a plane. A magnetic flux conducting member has a second surface that is not parallel to the first surface. A non-magnetic member is situated between the magnetic field sensor and the magnetic flux conducting member.
Claims22
A sensor, comprising:
- a substrate;
- a magnetic field sensor mounted to the substrate, the magnetic field sensor having a first surface defining a plane;
- a magnetic flux conducting member having a second surface that is not parallel to the first surface;
- a non-magnetic member situated between the magnetic field sensor and the magnetic flux conducting member;
- wherein the first surface and the second surface define a cavity, and wherein the non-magnetic member is situated in the cavity.
2 more elements
A method of making a magnetic sensor system, comprising:
- providing a semiconductor die having a sensor surface with a first surface defining a plane;
- mounting the semiconductor die to a substrate;
- situating a magnetic flux conducting member adjacent the semiconductor die, the magnetic flux conducting member having a second surface that is not parallel to the plane;
- and
- situating a non-magnetic member between the sensor surface and the magnetic flux conducting member, the non-magnetic member having a third surface that is complementary to the second surface;
- wherein the second surface creates a cavity, and wherein the non-magnetic member is formed by filling the cavity with a non-magnetic material.
3 more elements
Dependencies are inferred from the claim text.