Process for producing monosilane

A plant for the continuous production of monosilane and tetrachlorosilane by catalytic dismutation of trichlorosilane at an operating temperature and a pressure of from 1 to 50 bar abs., comprising the following units:

• a countercurrent reactor (1) having a double wall (2),
• at least one catalyst bed (4) which is located in the countercurrent reactor (1) and is provided with catalyst (3),
• a condenser (5) at the top of the countercurrent reactor (1),
• a vaporizer unit (6) at the bottom of the countercurrent reactor (1),
• at least one trichlorosilane feed line (7.1, 7.2) for the introduction of trichlorosilane (A) into the countercurrent reactor (1),
• a heat exchanger (7), with the trichlorosilane firstly conveyed by line (7.1, 7.2) via the heat exchanger (7) and preheated there by a bottom product from the vaporizer unit (6) and, for this purpose, the bottom product is fed by line (6.1, 6.2) via the heat exchanger (7) into the double wall (2) at a level in the lower part of the countercurrent reactor (1) and discharged (2.1, B) from the double wall (2) at a level in the upper part of the countercurrent reactor (1),
• a condensation unit (8) installed downstream of the condenser (5), and
• a subsequent distillation column (9) having an outlet for monosilane (C).