MEMS-based capacitive sensor
AssigneeWesternGeco L.L.C.
InventorHans Paulson
Life of this patent
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Abstract
An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal.
Claims32
An apparatus comprising:
- a seismic acquisition system, comprising an accelerometer,
- wherein the accelerometer comprises:
- a capacitive MEMS-based sensor comprising a proof mass, input terminals to receive a first signal and an output terminal electrically connected to the proof mass to provide a second signal indicative of an acceleration sensed by the sensor, wherein the first signal controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal;
- and
- a charge amplifier to provide a third signal indicative of a position of the proof mass, the charge amplifier having an input terminal to receive the second signal during a continuous time interval that includes a first time subinterval in which the first signal controls the equilibrium restoring force and a second time subinterval in which the sensor provides the second signal.
A method comprising:
- providing a seismic acquisition system having an accelerometer, the accelerometer comprising a capacitive MEMS-based sensor comprising a proof mass, input terminals to receive a first signal and an output terminal electrical connected to the proof mass to provide a second signal;
- regulating an equilibrium restoring force for the sensor;
- energizing the sensor to cause the sensor to provide the second signal;
- and
- sensing the second signal in a continuous time interval during which the acts of regulating and energizing occur.
An accelerometer comprising:
- a capacitive MEMS-based sensor comprising a proof mass, input terminals to receive a first signal and an output terminal electrical connected to the proof mass to provide a second signal indicative of an acceleration sensed by the sensor, wherein the first signal controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal;
- and
- a charge amplifier to provide a third signal indicative of a position of the proof mass, the charge amplifier having an input terminal to receive the second signal during a continuous time interval that includes a first time subinterval in which the first signal controls the equilibrium restoring force and a second time subinterval in which the sensor provides the second signal.
An accelerometer comprising:
- a capacitive MEMS-based sensor comprising a proof mass, input terminals to receive a first signal and an output terminal electrical connected to the proof mass to provide a second signal indicative of an acceleration sensed by the sensor, wherein the first signal controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal;
- a charge amplifier to provide a third signal indicative of a position of the proof mass, the charge amplifier having an input terminal;
- and
- a non-switched path to communicate the second signal from the sensor to the input terminal of the charge amplifier.
Dependencies are inferred from the claim text.