Self-aligned method for fabricating a high density GMR read element
AssigneeWestern Digital (Fremont), LLC
InventorsJinqiu Zhang, Ming Zhao, Mohamad T. Krounbi, Henry Yuan, Lien-Chang Wang
Life of this patent
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Abstract
A method is provided for fabricating a read element with leads that overlay a top surface of a sensor of the read element. The method includes forming a mask over a sensor layer, then using the mask to define the sensor from the sensor layer. The mask is then narrowed and a lead layer is formed that overlays both ends of the top surface of the sensor without covering a center portion of the top surface.
Claims32
A method for fabricating a read element, comprising:
- forming a sensor layer defining a plane having a perpendicular axis;
- forming a mask over a masked portion of the sensor layer;
- forming a sensor, including first and second ends, from the masked portion of the sensor layer;
- narrowing, after forming the sensor, the mask;
- and
- forming a first lead over the first end and a second lead over the second end.
A method for fabricating a read element, comprising:
- providing a substrate;
- forming a first shield layer over the substrate;
- forming a first gap layer over the first shield layer;
- forming over the first gap layer a sensor layer defining a plane having a perpendicular axis;
- forming a mask over a masked portion of the sensor layer;
- forming a sensor, including first and second ends, from the masked portion of the sensor layer;
- forming a hard bias layer over the first gap layer;
- forming a protective layer over the hard bias layer;
- narrowing, after forming the protective layer, the mask;
- and
- forming a lead layer over the hard bias layer and over the first and second ends of the sensor.
A self-aligned method for fabricating a read element, comprising:
- forming a sensor layer;
- forming a mask over the sensor layer;
- forming a sensor, including first and second ends, from the sensor layer;
- narrowing, after forming the sensor, the mask;
- and
- forming a first lead over the first end and a second lead over the second end.
Dependencies are inferred from the claim text.