Carbon nanotube resistor, semiconductor device, and manufacturing method thereof
AssigneeNEC Corporation
InventorKaoru Narita
Life of this patent
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Abstract
A process for producing a carbon nanotube resistor that is capable of providing a highly reliable resistor or fuse. The process comprises the step of introducing a carbon nanotube in a volatile solvent to a first concentration and conducting ultrasonic treatment thereof to thereby obtain an initial solution; the dilution step of stepwise diluting the initial solution with a volatile solvent under ultrasonication so as to adjust the same to a second concentration, thereby obtaining a coating solution; and the step of applying the coating solution between a first electrode and a second electrode, wherein the first concentration is 1(E10−4 g/ml or higher and the second concentration lower than 1(E10−5 g/ml.
Claims12
A method of manufacturing a carbon nanotube resistor, comprising:
- forming a first electrode and a second electrode;
- preparing an initial solution, by introducing carbon nanotubes into a volatile solution so that concentration becomes a first concentration and executing ultrasonic treatment;
- preparing an coating solution, by stepwise diluting said initial solution with a volatile solution so that concentration becomes a second concentration while executing ultrasonic treatment;
- and
- coating said coating solution between said first electrode and said second electrode,
- wherein said first concentration is 1×10−4 (g/ml) or more, and said second concentration is less than 1×10−5 (g/ml).
A carbon nanotube resistor comprising:
- a first electrode;
- a second electrode;
- and
- a mat layer arranged between said first electrode and said second electrode,
- wherein said mat layer includes a carbon nanotube film of which thickness is less than 50 nm,
- wherein a length of each particle in a majority of carbon nanotubes included in said mat layer is larger than 1/20 of a distance between said first electrode and said second electrode, and
- wherein said majority means 50% or more in number.
A carbon nanotube resistor comprising:
- a first electrode;
- a second electrode;
- and
- a mat layer arranged between said first electrode and said second electrode,
- wherein said mat layer includes a carbon nanotube film of which thickness is less than 50 nm,
- wherein a diameter of each particle in a major of carbon nanotubes included in said mat layer is larger than 0 and is 10 nm or less, and
- wherein said majority means 50% or more in number.
Dependencies are inferred from the claim text.